Device for connecting two wafers in a planar manner for grinding down and cutting up a product wafer
First Claim
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1. A device for connecting two wafers one on top of another in a planar manner, the device comprising:
- a vacuum chamber having a chamber volume and an evacuating device for said chamber volume;
a chuck having an evacuating device for receiving a carrier wafer having a surface with a double-sided adhesive film or an adhesive layer;
a heating device for heating up said chuck; and
a vacuum-chamber cover having a vacuum-holding device for holding a product wafer having a surface;
said vacuum-holding device configured on said vacuum-chamber cover for suspending the product wafer in said vacuum chamber at a distance above the carrier wafer such that the surface of the product wafer and the surface of the carrier wafer are congruent before being connected.
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Abstract
A device for connecting two wafers in a planar manner for grinding down and cutting up a product wafer has a vacuum chamber, a chuck for receiving a carrier wafer, a heating device for heating up the chuck and a vacuum-chamber cover with a vacuum-holding device, on which a product wafer can be arranged suspended above the carrier wafer. After the evacuation of the vacuum chamber, the active surface of the product wafer is dropped onto a double-sided adhesive film on the carrier wafer and is pressed into place by the rising pressure during air admission. The result is that the wafers are connected together.
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Citations
19 Claims
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1. A device for connecting two wafers one on top of another in a planar manner, the device comprising:
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a vacuum chamber having a chamber volume and an evacuating device for said chamber volume;
a chuck having an evacuating device for receiving a carrier wafer having a surface with a double-sided adhesive film or an adhesive layer;
a heating device for heating up said chuck; and
a vacuum-chamber cover having a vacuum-holding device for holding a product wafer having a surface;
said vacuum-holding device configured on said vacuum-chamber cover for suspending the product wafer in said vacuum chamber at a distance above the carrier wafer such that the surface of the product wafer and the surface of the carrier wafer are congruent before being connected. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification