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Glass substrate cassette

  • US 20060032826A1
  • Filed: 03/30/2005
  • Published: 02/16/2006
  • Est. Priority Date: 08/13/2004
  • Status: Active Grant
First Claim
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1. A substrate cassette comprising:

  • a bottom frame;

    a top frame;

    a pair of side supports facing each other and affixed to space said bottom frame and said top frame; and

    at least one support plate, affixed in between to said pair of side supports, having recess portions configured to allow a delivery device to be inserted into said one of more recess portions for loading a glass substrate to the support plate or unloading a glass substrate upon the support plate.

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