Resonant micro-electro-mechanical system with analog driving
First Claim
1. A resonant micro-electro-mechanical system, comprising:
- a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom; and
a driving device coupled to said mass for maintaining said mass in oscillation at a resonance frequency, said driving device including;
a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said mass, an actuation and control stage supplying second signals for driving said mass on the basis of said first signals, and filtering means of a high-pass type, said filtering means being connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency.
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Abstract
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance frequency. The driving device includes a differential sense amplifier supplying first signals indicative of a velocity of oscillation of the mass, and an actuation and control stage supplying second signals for driving the mass on the basis of the first signals. The driving device moreover includes a filtering circuit of a high-pass type, which is connected between the differential sense amplifier and the actuation and control stage, and has a bandpass that includes the resonance frequency.
34 Citations
22 Claims
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1. A resonant micro-electro-mechanical system, comprising:
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a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom; and
a driving device coupled to said mass for maintaining said mass in oscillation at a resonance frequency, said driving device including;
a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said mass, an actuation and control stage supplying second signals for driving said mass on the basis of said first signals, and filtering means of a high-pass type, said filtering means being connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An integrated micro-electro-mechanical gyroscope, comprising:
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a microstructure having a first mass which is free to oscillate along a first axis;
a driving device coupled to said first mass for maintaining said first mass in oscillation at a resonance frequency, said driving device including a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said first mass, an actuation and control stage supplying second signals for driving said first mass on the basis of said first signals, and filtering means of a high-pass type, said filtering means connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency; and
inertial sensor means which is mechanically coupled to said first mass so as to be fixedly drawn along by said first mass along said first axis and having an axis of detection perpendicular to said first axis - View Dependent Claims (13, 14, 15)
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16. An integrated micro-electro-mechanical system, comprising:
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a microstructure including a first mass constrained to oscillate along a first axis and a second mass constrained to oscillate along the first axis and a second axis, the second mass coupled to the first mass;
an analog driving device coupled to the first mass in a feedback loop for maintaining the first mass in oscillation at a resonance frequency; and
an analog reading device coupled to the second mass for detecting motion of the second mass along the second axis. - View Dependent Claims (17, 18, 19, 20)
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21. A method for driving a resonant micro-electro-mechanical system, comprising the steps of:
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receiving reading currents indicative of an oscillation velocity of a driving mass constrained to move along a first axis, the driving mass being coupled to a sensing mass and the sensing mass being configured to move along the first axis and a second axis;
analog processing the reading currents to generate driving signals; and
applying the driving signals to the driving mass to maintain the driving mass in oscillation along the first axis at a resonance frequency. - View Dependent Claims (22)
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Specification