Photonic MEMS and structures
First Claim
1. An optical modulator comprising:
- a substrate;
a first optical layer which is at least partially transmissive to incident light, the first optical layer spaced from the substrate; and
a second optical layer which is at least partially reflective to incident light, the second optical layer between the substrate and the first optical layer and movable between a first position and a second position, wherein movement of the second optical layer between the first position and the second position modulates a reflectivity of the optical modulator.
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Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
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Citations
25 Claims
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1. An optical modulator comprising:
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a substrate;
a first optical layer which is at least partially transmissive to incident light, the first optical layer spaced from the substrate; and
a second optical layer which is at least partially reflective to incident light, the second optical layer between the substrate and the first optical layer and movable between a first position and a second position, wherein movement of the second optical layer between the first position and the second position modulates a reflectivity of the optical modulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An optical modulator comprising:
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means for supporting the optical modulator;
means for at least partially transmitting incident light, the transmitting means spaced from the supporting means; and
means for at least partially reflecting incident light, the reflecting means between the supporting means and the transmitting means, the reflecting means movable between a first position and a second position, wherein movement of the reflecting means between the first position and the second position modulates a reflectivity of the optical modulator.
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- 17. The optical modulator of claim 17, wherein the supporting means comprises a substrate.
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20. A method of modulating light, the method comprising:
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providing an optical modulator comprising a substrate, a first optical layer which is at least partially transmissive to incident light, and a second optical layer which is at least partially reflective to incident light, the first optical layer spaced from the substrate, the second optical layer between the substrate and the first optical layer and movable between a first position and a second position;
irradiating the first optical layer with light;
irradiating the second optical layer with a portion of the light transmitted through the first optical layer; and
moving the second optical layer between the first position and the second position.
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21. A method of forming an optical modulator, the method comprising:
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providing a substrate;
forming a first optical layer spaced from the substrate, the first optical layer at least partially transmissive to incident light; and
forming a second optical layer between the substrate and the first optical layer, the second optical layer at least partially reflective to incident light, the second optical layer movable between a first position and a second position.
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22. A device comprising a plurality of optical modulators on a substrate, wherein each optical modulator comprises:
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a first optical layer which is at least partially transmissive to incident light, the first optical layer spaced from the substrate; and
a second optical layer which is at least partially reflective to incident light, the second optical layer between the substrate and the first optical layer and movable between a first position and a second position, wherein movement of the second optical layer between the first position and the second position modulates a reflectivity of the optical modulator. - View Dependent Claims (23, 24, 25)
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Specification