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Photonic MEMS and structures

  • US 20060033975A1
  • Filed: 10/21/2005
  • Published: 02/16/2006
  • Est. Priority Date: 05/01/1995
  • Status: Active Grant
First Claim
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1. An optical modulator comprising:

  • a substrate;

    a first optical layer which is at least partially transmissive to incident light, the first optical layer spaced from the substrate; and

    a second optical layer which is at least partially reflective to incident light, the second optical layer between the substrate and the first optical layer and movable between a first position and a second position, wherein movement of the second optical layer between the first position and the second position modulates a reflectivity of the optical modulator.

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