Hinge for micro-mirror devices
First Claim
1. A hinge for a micro-mirror device comprising a doped semiconductor wherein said hinge is hidden from incident light and is of a type selected from the group consisting of cantilever hinge, vertical cantilever hinge, torsion hinge, and compound torsion vertical cantilever hinge.
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Accused Products
Abstract
An improved hinge for a micro-mirror device composed of a conductive doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor
20 Citations
19 Claims
- 1. A hinge for a micro-mirror device comprising a doped semiconductor wherein said hinge is hidden from incident light and is of a type selected from the group consisting of cantilever hinge, vertical cantilever hinge, torsion hinge, and compound torsion vertical cantilever hinge.
Specification