Frame structure and semiconductor attach process for use therewith for fabrication of image sensor packages and the like, and resulting packages
First Claim
1. A method for packaging a semiconductor die, comprising:
- providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having at least an inverted step extending peripherally thereabout and at least one upper step extending peripherally thereabout;
securing a semiconductor die in the aperture of at least one frame of the plurality of frames with an active surface of the semiconductor die substantially abutting a surface of the at least an inverted step and a substantial portion of lateral sides thereof received within the aperture; and
securing a window in the aperture of the at least one frame with a surface of the window substantially abutting a surface of the at least one upper step.
8 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor package such as an image sensor package, and methods for fabrication. A frame structure includes an array of frames, each having an aperture therethrough, into which an image sensor die in combination with a cover glass, filter, lens or other components may be installed in precise mutual alignment. Singulated image sensor dice and other components may be picked and placed into each frame of the frame structure. Alternatively, the frame structure may be configured to be aligned with and joined to a wafer bearing a plurality of image sensor dice, wherein optional, downwardly protruding skirts along peripheries of the frames may be received into kerfs cut along streets between die locations on the wafer, followed by installation of other package components. In either instance, the frame structure in combination with singulated image sensor dice or a joined wafer is singulated into individual image sensor packages. Various external connection approaches may be used for the packages.
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Citations
167 Claims
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1. A method for packaging a semiconductor die, comprising:
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providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having at least an inverted step extending peripherally thereabout and at least one upper step extending peripherally thereabout;
securing a semiconductor die in the aperture of at least one frame of the plurality of frames with an active surface of the semiconductor die substantially abutting a surface of the at least an inverted step and a substantial portion of lateral sides thereof received within the aperture; and
securing a window in the aperture of the at least one frame with a surface of the window substantially abutting a surface of the at least one upper step. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 76, 77, 117)
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39. A method for packaging a semiconductor die, comprising:
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providing a wafer bearing a plurality of semiconductor dice thereon, wherein semiconductor dice of the plurality are separated by kerfs extending downwardly into the wafer from an surface thereof along streets between the semiconductor dice of the plurality;
providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having at least an inverted step extending peripherally thereabout and at least one upper step extending peripherally thereabout, the lower surface of the frame structure further including protrusions sized and configured to be received in the kerfs;
aligning the lower surface of the frame structure with the surface of the wafer and inserting the protrusions into the kerfs until the surface of the wafer substantially abuts the inverted lower steps of the plurality of frames and the protrusions extend over lateral sides of the plurality of semiconductor dice defined by the kerfs and securing the plurality of semiconductor dice to the plurality of frames; and
securing windows in at least some of the apertures with surfaces of the windows substantially abutting surfaces of the at least one upper step. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75)
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78. An image sensor package, comprising:
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a rectangular frame having upper and lower surfaces and substantially planar outer side surfaces;
an aperture extending from the upper surface to the lower surface and having a lower inverted step and at least an upper step surrounding the aperture;
a semiconductor die having an active surface including an optically active region and bond pads disposed peripherally with respect thereto, a back side and lateral sides, the semiconductor die substantially disposed in the aperture with the active surface joined to the lower inverted step, the lateral sides substantially covered by a skirt portion of the frame; and
an optically transmissive window disposed in the aperture and secured to the at least an upper step. - View Dependent Claims (79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99)
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100. A method for packaging a semiconductor die, comprising:
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providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having a first step extending peripherally thereabout and at least another, higher step extending peripherally thereabout and peripherally about the first step;
securing a semiconductor die in the aperture of at least one frame of the plurality of frames with a back side of the semiconductor die substantially abutting a surface of a first step and lateral sides thereof received within the aperture; and
securing a window in the aperture of the at least one frame with a surface of the window substantially abutting a surface of the at least another, higher step. - View Dependent Claims (101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 133, 134, 140, 141)
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132. The method of claim 1130, wherein the lens comprises a microfluidic lens of two immiscible liquids in a hydrophobic tube and is configured for adjustment of focal length responsive to selective application of a voltage.
- 135. The method of claim 135, further comprising forming the plurality of frames of the frame structure to include at least a further, higher step below the another, higher step and encompassed peripherally thereby.
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138. An image sensor package, comprising:
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a rectangular frame having upper and lower surfaces and substantially planar outer side surfaces;
an aperture extending from the upper surface to the lower surface and having at least a first step and at least another, higher step surrounding the aperture;
a semiconductor die having an surface including an optically active region, a back side and lateral sides, the semiconductor die substantially disposed in the aperture with the back side joined to the at least a first step, the lateral sides substantially covered by a skirt portion of the frame; and
an optically transmissive window disposed in the aperture and secured to the at least another, higher step. - View Dependent Claims (139, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154)
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155. A method for packaging a semiconductor die, comprising:
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providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having at least an inverted step extending peripherally thereabout;
securing a semiconductor die in the aperture of at least one frame of the plurality of frames with an active surface of the semiconductor die substantially abutting a surface of the at least an inverted step and a substantial portion of lateral sides thereof received within the aperture; and
securing a window substrate over the upper surface of the frame structure and over the apertures of the plurality of frames. - View Dependent Claims (156)
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157. A method for packaging a semiconductor die, comprising:
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providing a wafer bearing a plurality of semiconductor dice thereon, wherein semiconductor dice of the plurality are separated by kerfs extending downwardly into the wafer from an surface thereof along streets between the semiconductor dice of the plurality;
providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having at least an inverted step extending peripherally thereabout, the lower surface of the frame structure further including protrusions sized and configured to be received in the kerfs;
aligning the lower surface of the frame structure with the surface of the wafer and inserting the protrusions into the kerfs until the surface of the wafer substantially abuts the inverted lower steps of the plurality of frames and the protrusions extend over lateral sides of the plurality of semiconductor dice defined by the kerfs and securing the plurality of semiconductor dice to the plurality of frames; and
securing a window substrate over the upper surface of the frame structure and over the apertures of the plurality of frames. - View Dependent Claims (158)
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159. A method for packaging a semiconductor die, comprising:
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providing a wafer bearing a plurality of semiconductor dice on an active surface thereof;
providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure;
aligning the frame structure with the active surface of the wafer and securing the lower surface of the frame structure to the active surface of the wafer, each aperture of a frame exposing a semiconductor die of the plurality; and
securing a window substrate over the upper surface of the frame structure and over the apertures of the plurality of frames. - View Dependent Claims (160)
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161. A method for packaging a semiconductor die, comprising:
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providing a wafer bearing a plurality of semiconductor dice on an active surface thereof;
providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and at least one upper step extending peripherally about the aperture;
aligning the frame structure with the active surface of the wafer and securing the lower surface of the frame structure to the active surface of the wafer, each aperture of a frame exposing a semiconductor die of the plurality; and
securing windows in at least some of the apertures with surfaces of the windows substantially abutting surfaces of the at least one upper step. - View Dependent Claims (162)
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163. An image sensor package, comprising:
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a rectangular frame having upper and lower surfaces and substantially planar outer side surfaces;
an aperture extending from the upper surface to the lower surface and having a lower inverted step surrounding the aperture;
a semiconductor die having an active surface including an optically active region and bond pads disposed peripherally with respect thereto, a back side and lateral sides, the semiconductor die substantially disposed in the aperture with the active surface joined to the lower inverted step, the lateral sides substantially covered by a skirt portion of the frame; and
an optically transmissive window disposed over and secured to the upper surface of the rectangular frame.
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164. An image sensor package, comprising:
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a rectangular frame having upper and lower surfaces and substantially planar outer side surfaces;
an aperture extending from the upper surface to the lower surface;
a semiconductor die having an active surface including an optically active region and bond pads disposed peripherally with respect thereto, a back side and lateral sides, the semiconductor die substantially disposed under the aperture with the active surface abutting and secured to the lower surface of the rectangular frame; and
an optically transmissive window disposed over and secured to the upper surface of the rectangular frame.
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165. A method for packaging a semiconductor die, comprising:
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providing a frame structure including a plurality of frames, each frame of the plurality including an aperture extending therethrough between an upper surface and a lower surface of the frame structure and each aperture having a first step extending peripherally thereabout;
securing a semiconductor die in the aperture of at least one frame of the plurality of frames with a back side of the semiconductor die substantially abutting a surface of a first step and lateral sides thereof received within the aperture; and
securing a window substrate over the upper surface of the frame structure over the aperture of the frames. - View Dependent Claims (166)
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167. An image sensor package, comprising:
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a rectangular frame having upper and lower surfaces and substantially planar outer side surfaces;
an aperture extending from the upper surface to the lower surface and having at least a first step surrounding the aperture;
a semiconductor die having an surface including an optically active region, a back side and lateral sides, the semiconductor die substantially disposed in the aperture with the back side joined to the at least a first step, the lateral sides substantially covered by a skirt portion of the frame; and
an optically transmissive window disposed over and secured to the upper surface of the rectangular frame.
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Specification