Microscopic batteries for MEMS systems
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Accused Products
Abstract
Microscopic batteries, integratable or integrated with and integrated circuit, including a MEMS microcircuit, and methods of microfabrication of such microscopic batteries are disclosed.
72 Citations
118 Claims
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103. A microscopic system selected from the group consisting of:
- (a) a microelectromechanical system and (b) a non-microelectromechanical system of microsize congruent with the microsize of the microelectromechanical system, the system comprising;
a microcircuit comprised of a plurality of microlayers formed by microfabrication comprising microdepositions of materials and selective removal of sacrificial material from at lease one microlayer to at least form a pattern of microconductors;
a microfabricated battery internal of the system and having a microsize congruent with the microsize of the microcircuit to accommodate a size compatibility and internal integration of the microfabricated battery into the circuit without external connectors, the microfabricated battery comprising microlayers formed by microfabrication comprising microdeposition of material and selective removal of sacrificial material from at least one microlayer to form a pattern, the microfabricated battery comprise a microanode, a microcathode and a microscopic amount of electrolyte spanning between the microanode and the microcathode. - View Dependent Claims (104, 105, 106, 107)
- (a) a microelectromechanical system and (b) a non-microelectromechanical system of microsize congruent with the microsize of the microelectromechanical system, the system comprising;
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108. A microscopic electronic system selected from the group consisting of (a) a microscopic electronic system having at least one microelectromechanical component and (b) microelectronic systems without a microelectromechanical component but having at least one microelectromechanical component, the microscopic electronic system comprising:
microscopic circuitry and an internal microfabricated battery without external conductors, the microscopic circuitry and the microfabricated battery being comprised of microscopic layers, at least one of which is common to the microscopic circuit and the microfabricated battery, formed using microfabrication techniques comprising deposition of microscopically thin material, sacrificial removal of some of the microscopically thin material and etching. - View Dependent Claims (109)
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110. In stacked combination, a rigid non-conductive substrate, a microscopic battery formed by microfabrication comprising layer deposition and selective removal of material, the microscopic battery being superimposed upon the substrate, and a microscopic circuit formed by microfabrication comprising layer deposition and selective removal of deposited material, superimposed upon and electronically integrated without external conductors to the microfabricated battery.
- 111. A microfabricated battery formed by microfabrication comprising microscopic film electrodes and microscopic amount of electrolyte having low power loss characteristics and a power discharge capability within a range of no more than 10 W.cm2.
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114. A microscopic battery comprising spaced concentric microfabricated microscopic electrodes with a microscopic amount of electrolyte in a microscopic reservoir concentrically interposed between the microscopic electrodes.
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115. A method of making a microscopic battery comprising the steps of:
providing extrudible sources of cathode material, anode material and electrolyte materially and extruding microscopic amounts of the three materials simultaneously in concentric microscopic relation with the extruded electrolyte material being in a microscopic amount interposed between the extruded microscopic amounts of anode and cathode materials.
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116. A microscopic battering having elements comprising spaced microscopic electrodes and a microscopic cavity containing electrolyte spanning between the electrodes, at least one of the element having a dimension as small as ½
- micron.
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117. A method of unitarily fabricating an integrated microscopic circuit and microfabricated battery as an internal part of the integrated circuit comprising seriatim the acts of microfabrication by depositing as thin film microlayers a first microscopic electrode layer, a separator layer and a second microscopic electrode layer while correspondingly integratingly microfabricating the integrated circuit at the same site so as to electrically interconnecting the microfabricated battery to the integrated microscopic circuit during microfabrication at least one microlayer comprising an etched reduction in deposited material.
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118. A microscopic battery comprising a microscopic film anode, a microscopic film cathode, microscopic amount of electrolyte spanning between the anode and cathode, the microscopic battery comprising specific energy within the range of 101.1 to 12.1 KJ/kg and specific power within the range 10−
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1.2 to 10−
1.4 kW/kg.
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1.2 to 10−
Specification