Method and system for sequential processing in a two-compartment chamber
First Claim
1. A method for sequentially processing a plurality of workpieces, the method comprising the steps of:
- a) processing a first plurality of workpieces on a first workpiece mover in a first compartment and a second plurality of workpieces on a second workpiece mover in a second compartment;
b) exchanging the workpieces on the workpiece movers between the first and second compartments through a plurality of internal pathways, the first and second compartments being isolated from each other by a first plurality of pathway doors coupled to the workpiece movers;
c) processing the first plurality of workpieces in the second compartment and the second plurality of workpieces in the first compartment; and
d) exchanging the workpieces on the workpiece movers between the first and second compartments through the internal pathways, the first and second compartments being isolated from each other by a second plurality of pathway doors coupled to the workpiece movers.
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Accused Products
Abstract
An apparatus and method for sequential and isolated processing of a workpiece comprises a two compartment chamber and a mechanism to transfer the workpiece from a fist compartment to a second compartment by rotating the workpiece on a workpiece mover through an internal pathway. The transfer mechanism comprises two doors coupled to the workpiece mover to seal the internal pathway between the first and second compartments so that the two compartments are isolated and the workpiece can be processed sequentially and in isolation. The apparatus further comprises components to enable the processing of a workpiece. The preferred method of processing a workpiece is to deposit or adsorb a thin layer in the first compartment and then transfer by rotating the workpiece on the workpiece mover to the second compartment for further processing. The workpiece can then be transferred once again to the first compartment for further processing, and again to the second compartment, repeating the processing and transferring steps until a desired thin film is achieved.
189 Citations
20 Claims
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1. A method for sequentially processing a plurality of workpieces, the method comprising the steps of:
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a) processing a first plurality of workpieces on a first workpiece mover in a first compartment and a second plurality of workpieces on a second workpiece mover in a second compartment;
b) exchanging the workpieces on the workpiece movers between the first and second compartments through a plurality of internal pathways, the first and second compartments being isolated from each other by a first plurality of pathway doors coupled to the workpiece movers;
c) processing the first plurality of workpieces in the second compartment and the second plurality of workpieces in the first compartment; and
d) exchanging the workpieces on the workpiece movers between the first and second compartments through the internal pathways, the first and second compartments being isolated from each other by a second plurality of pathway doors coupled to the workpiece movers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An improved method for sequentially processing a plurality of workpieces on at least two workpiece movers, the improvement comprising:
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enhancing throughput of the processing by exchanging said workpiece movers through a plurality of internal pathways between at least two processing chambers; and
isolating each chamber for each of a plurality of processing steps with a plurality of doors coupled to the workpiece mover, said doors sealing the internal pathways at completion of the exchanging step. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method for sequentially processing a plurality of workpieces, the method comprising the steps of:
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a) processing a first workpiece associated with a first workpiece mover in a first compartment and a second workpiece associated with a second workpiece mover in a second compartment;
b) exchanging the workpieces on the workpiece movers between the first and second compartments through a plurality of internal pathways, the first and second compartments being isolated from each other by a first plurality of pathway doors coupled to the workpiece movers, with said pathway doors closing the internal pathways;
c) processing the first plurality of workpieces in the second compartment and the second plurality of workpieces in the first compartment; and
d) exchanging the workpieces on the workpiece movers between the first and second compartments through the internal pathways, the first and second compartments being isolated from each other by a second plurality of pathway doors coupled to the workpiece movers, with said pathway doors closing the internal pathways.
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Specification