Cooling of substrate using interposer channels
First Claim
1. A structure, comprising:
- a substrate comprising N continuous substrate channels on a first side of the substrate, said substrate having a heat source therein, said N being at least 2; and
an interposer comprising N continuous interposer channels, said N interposer channels being coupled to the N substrate channels so as to form M continuous loops such that 1≦
M≦
N, each loop of the M loops independently consisting of K substrate channels of the N substrate channels and K interposer channels of the N interposer channels in an alternating sequence of substrate channels and interposer channels, for each loop of the M loops said K is at least 1 and is subject to an upper limit consistent with a constraint of having the M loops collectively consist of the N interposer channels and the N substrate channels, each loop of the M loops independently being open ended or closed, said first side of the substrate being connected to the interposer, said interposer adapted to be thermally coupled to a heat sink such that the interposer is interposed between the substrate and the heat sink.
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Abstract
A structure, and method of forming and cooling the structure. The structure may include a substrate (e.g., a semiconductor chip) having N continuous substrate channels and an interposer having N continuous interposer channels (N≧2). The N interposer channels are coupled to the N substrate channels to form M continuous loops (1≦M≦N). The M loops may transfer heat from a heat source within the substrate to the interposer and then to a heat sink thermally coupled to the interposer. The structure may include an interposer having a thermally conductive enclosure surrounding a cavity. The cavity contains a thermally conductive foam material (e.g., graphite foam). The foam material contains a serpentine channel having contiguously connected channel segments. The serpentine channel may transfer heat from a heat source within a substrate (e.g., a semiconductor chip) to the interposer and then to a heat sink thermally coupled to the interposer.
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Citations
38 Claims
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1. A structure, comprising:
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a substrate comprising N continuous substrate channels on a first side of the substrate, said substrate having a heat source therein, said N being at least 2; and
an interposer comprising N continuous interposer channels, said N interposer channels being coupled to the N substrate channels so as to form M continuous loops such that 1≦
M≦
N, each loop of the M loops independently consisting of K substrate channels of the N substrate channels and K interposer channels of the N interposer channels in an alternating sequence of substrate channels and interposer channels, for each loop of the M loops said K is at least 1 and is subject to an upper limit consistent with a constraint of having the M loops collectively consist of the N interposer channels and the N substrate channels, each loop of the M loops independently being open ended or closed, said first side of the substrate being connected to the interposer, said interposer adapted to be thermally coupled to a heat sink such that the interposer is interposed between the substrate and the heat sink. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 19)
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16. A method of cooling a substrate, comprising:
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providing a substrate comprising N continuous substrate channels on a first side of the substrate, said substrate having a heat source therein, said N being at least 2;
providing an interposer comprising N continuous interposer channels, said N interposer channels being coupled to the N substrate channels so as to form M continuous loops such that 1≦
M≦
N, each loop of the M loops independently consisting of K substrate channels of the N substrate channels and K interposer channels of the N interposer channels in an alternating sequence of substrate channels and interposer channels, for each loop of the M loops said K is at least 1 and is subject to an upper limit consistent with a constraint of having the M loops collectively consist of the N interposer channels and the N substrate channels, each loop of the M loops independently being open ended or closed, said first side of the substrate being connected to the interposer, said interposer being thermally coupled to a heat sink such that the interposer is interposed between the substrate and the heat sink.generating heat by the heat source; and
circulating fluid in the N substrate channels and the N substrate channels, wherein a portion of the heat generated by the heat source is transferred to the fluid in the N substrate channels, and wherein a percentage of the portion of the heat is transferred from the fluid in the M interposer channels to the heat sink. - View Dependent Claims (17, 18, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of forming a structure, comprising:
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providing a substrate comprising N continuous substrate channels on a first side of the substrate, said substrate having a heat source therein, said N being at least 2; and
providing an interposer comprising N continuous interposer channels, said N interposer channels being coupled to the N substrate channels so as to form M continuous loops such that 1≦
M≦
N, each loop of the M loops independently consisting of K substrate channels of the N substrate channels and K interposer channels of the N interposer channels in an alternating sequence of substrate channels and interposer channels, for each loop of the M loops said K is at least 1 and is subject to an upper limit consistent with a constraint of having the M loops collectively consist of the N interposer channels and the N substrate channels, each loop of the M loops independently being open ended or closed, said first side of the substrate being connected to the interposer, said interposer adapted to be thermally coupled to a heat sink such that the interposer is interposed between the substrate and the heat sink. - View Dependent Claims (32)
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- 33. A structure, comprising an interposer adapted to be interposed between a heat source and a heat sink and to transfer heat from the heat source to the heat sink, said interposer comprising an enclosure that encloses a cavity, said enclosure being made of a thermally conductive material, said cavity comprising a thermally conductive foam material therein, said foam material comprising pores and comprising at least one serpentine channel, each serpentine channel having a plurality of contiguously connected channel segments, each serpentine channel independently forming a closed loop or an open ended loop, said foam material adapted to be soaked by a liquid filling said pores, each serpentine channel being adapted to be partially filled with a fluid that serves to transfer heat from the heat source to the heat sink.
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35. A method of cooling a substrate, comprising:
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providing a heat source, a heat sink, and an interposer, said the interposer being interposed between the heat sink and the heat source, said interposer comprising an enclosure that encloses a cavity, said enclosure being made of a thermally conductive material, said cavity comprising a thermally conductive foam material therein, said foam material comprising pores and comprising at least one serpentine channel, each serpentine channel having a plurality of contiguously connected channel segments, each serpentine channel independently forming a closed loop or an open ended loop, said foam being soaked by a liquid filling said pores;
generating heat by the heat source; and
providing a fluid in each serpentine channel, wherein a portion of the heat generated by the heat source is transferred to the fluid, and wherein a percentage of the portion of the heat is transferred from the fluid to the heat sink. - View Dependent Claims (36)
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- 37. A method of forming a structure, comprising providing an interposer adapted to be interposed between a heat source and a heat sink and to transfer heat from the heat source to the heat sink, said interposer comprising an enclosure that encloses a cavity, said enclosure being made of a thermally conductive material, said cavity comprising a thermally conductive foam material therein, said foam material comprising pores and comprising at least one serpentine channel, each serpentine channel having a plurality of contiguously connected channel segments, each serpentine channel independently forming a closed loop or an open ended loop, said foam material adapted to be soaked by a liquid filling said pores, each serpentine channel being adapted to be partially filled with a fluid that serves to transfer heat from the heat source to the heat sink.
Specification