Carrier facilitating radio-frequency identification (RFID) operation in a semiconductor fabrication system

• US 20060043197A1
• Filed: 08/31/2004
• Published: 03/02/2006
• Est. Priority Date: 08/31/2004
• Status: Abandoned Application

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Fu, Hsieh Shyh, Hsieh, Hung Ti, Chang, Yung Cheng, Chan, Meng Shiun
• Application Number:
  US10/930,111
• Publication Number:
  US 20060043197A1
• Time in Patent Office: Days
• US Class Current: 235/492
• CPC Class Codes: G05B 19/128 the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/33199 Transponder
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A carrier for radio-frequency identification (RFID) operation in a fab. A carrier body comprises a plate inscribed with permanent information corresponding to the carrier. A RFID tag is mounted on the carrier body, and stores the permanent information.

Claims

1. A carrier for radio-frequency identification (RFID) operation in a fab, comprising:

a carrier body, comprising a plate inscribed with permanent information corresponding to the carrier; and

a RFID tag, mounted on the carrier body, storing the permanent information.

2. The carrier of claim 1, wherein the carrier is used for holding at least one wafer.

3. The carrier of claim 2, wherein the carrier is a front opening unified pod (FOUP).

4. The carrier of claim 2, wherein the carrier is a front opening shipping box (FOSB).

5. The carrier of claim 1, wherein the carrier is a reticle pod.

6. The carrier of claim 1, wherein the permanent information is carrier identification information.

7. A processing system, comprising:

a station mounted with a RFID reader;

a carrier, carrying a workpiece processed in the processing system, comprising;

a carrier body, comprising a plate inscribed with permanent information corresponding to the carrier; and

a RFID tag, mounted on the carrier body, storing the permanent information; and

a control center, providing processing information according to the permanent information and directing operation of the station accordingly.

8. The processing system of claim 7, wherein the carrier is loaded with at least one wafer.

9. The processing system of claim 8, wherein the carrier is a front opening unified pod (FOUP).

10. The processing system of claim 8, wherein the carrier is a front opening shipping box (FOSB).

11. The processing system of claim 7, wherein the carrier is used for holding at least one reticle.

12. The processing system of claim 7, wherein the permanent information is carrier identification information.

13. The processing system of claim 7, wherein the station is a processing tool fabricating the a workpiece.

14. The processing system of claim 7, wherein the station is a stocking station storing the a workpiece.