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System and method of sensing actuation and release voltages of an interferometric modulator

  • US 20060044298A1
  • Filed: 01/28/2005
  • Published: 03/02/2006
  • Est. Priority Date: 08/27/2004
  • Status: Active Grant
First Claim
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1. A method of determining one or both of an actuation voltage and a release voltage of a microelectromechanical device, the method comprising:

  • applying at least two different electric potentials to at least one electrode coupled to said device;

    detecting at least one capacitance dependent response of said device at said at least two different electric potentials;

    determining, based at least in part on said response, a state of said device at said at least two different electric potentials, and determining one or both of said actuation voltage and release voltage based at least in part on said determining.

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