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Method and system for sequential processing in a two-compartment chamber

  • US 20060046412A1
  • Filed: 05/26/2005
  • Published: 03/02/2006
  • Est. Priority Date: 08/06/2002
  • Status: Abandoned Application
First Claim
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1. A method for sequentially processing a plurality of workpieces, the method comprising the steps of:

  • a) processing a first plurality of workpieces on a workpiece mover in a first compartment and a second plurality of workpieces on the workpiece mover in a second compartment;

    b) rotating the workpieces on the workpiece mover between the first and second compartments through a plurality of internal pathways, the first and second compartments being isolated from each other by a plurality of pathway doors coupled to the workpiece mover, with said pathway doors closing the internal pathways at a first side;

    c) processing the first plurality of workpieces in the second compartment and the second plurality of workpieces in the first compartment; and

    d) rotating back the workpieces on the workpiece mover between the first and second compartments through the internal pathways, the first and second compartments being isolated from each other by the pathway doors, with said pathway doors closing the internal pathways at a second side.

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