Method

• US 20060047132A1
• Filed: 09/02/2005
• Published: 03/02/2006
• Est. Priority Date: 09/02/2004
• Status: Active Grant

• Current Assignee: UBE Industries Limited
• Original Assignee: Rohm and Haas Electronic Materials LLC (DuPont de Nemours, Inc.)
• Inventors: Shenai-Khatkhate, Deodatta Vinayak, Amamchyan, Artashes
• Granted Patent: US 7,166,734 B2
• Time in Patent Office: Days
• US Class Current: 556/1
• CPC Class Codes: C07F 3/00 Compounds containing elements of Groups 2 or 12 of the Periodic Table
• CPC Class Codes: C07F 3/06 Zinc compounds
• CPC Class Codes: C07F 5/00 Compounds containing elements of Groups 3 or 13 of the Periodic Table
• CPC Class Codes: C07F 5/062 Al linked exclusively to C
• CPC Class Codes: C07F 5/064 compounds with an Al-Halogen linkage
• CPC Class Codes: C23C 16/301 AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi

Abstract

Organometallic compounds of Group IIB and IIIA metals that are substantially pure and contain low levels of oxygenated impurities are provided. Also provided are methods of preparing such organometallic compounds.

Claims

1. A compound of the formula R_aM^bY_c, wherein each R is independently a (C₁-C₁₀) organic radical, M is a Group IIB or IIIA metal, each Y is independently a (C₁-C₄) carboxylate or halogen, a=1-3, b is the valence of M, c=0-2, and a+c=b;

having a purity of 99.9999% and having less than 0.5 ppm of oxygenated impurities.

2. The compound of claim 1 wherein M is indium or gallium.

3. A method of preparing the compound of claim 1 comprising the steps of:

reacting a compound of the formula R¹_a′

M1^b′

Y¹_c, wherein each R¹ is independently a (C₁-C₁₀) organic radical, M1 is a Group IIB or IIIA metal, each Y¹ is independently a (C₁-C₄) carboxylate or halogen, a′

=0-2, b′

is the valence of M,1 c′

=1-3, and a′

+c′

=b′

, with a compound of the formula R²_xM2Y²_3-x wherein each R² is independently a (C₁-C₁₀) organic radical, M2 is a Group IIIA metal, each Y² is independently a (C₁-C₄) carboxylate or halogen, x=1-3, in the presence of a tertiary amine or a tertiary phosphine, wherein an electronegativity of M1≧

an electronegativity of M2.

4. The method of claim 3 wherein Y is halogen.

5. The method of claim 3 wherein the reaction is performed in the presence of an organic solvent.

6. The method of claim 5 wherein M1 and M2 are both aluminum.

7. The method of claim 3 further comprising a heating step.

8. The method of claim 3 wherein each R¹ and each R² are (C₁-C₆)alkyl.

9. The method of claim 3 wherein the tertiary amine has a formula NR⁴R⁵R⁶, wherein R⁴, R⁵ and R⁶ are independently chosen from (C₁-C₆)alkyl, di(C₁-C₆)alkylamino-substituted (C₁-C₆)alkyl, and phenyl;

and wherein R⁴ and R⁵ may be taken together along with the nitrogen to which they are attached to form a 5-7 membered heterocyclic ring.

10. The method of claim 9 wherein a trialkyl aluminum and an aluminum trihalide are produced.