Displacement estimation system and method
First Claim
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1. A displacement estimation system comprising:
- a data acquisition system; and
a processing system;
wherein the data acquisition system is configured to capture a first frame from a first substrate including a first pattern at a first time and capture a second frame from a second substrate including a second pattern at a second time subsequent to the first time, wherein the first pattern and the second pattern are substantially identical, and wherein the processing system is configured to calculate a displacement between the first pattern and the second pattern using the first frame and the second frame.
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Abstract
A displacement estimation system comprising a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first frame from a first substrate including a first pattern at a first time and capture a second frame from a second substrate including a second pattern at a second time subsequent to the first time. The first pattern and the second pattern are substantially identical. The processing system is configured to calculate a displacement between the first pattern and the second pattern using the first frame and the second frame.
22 Citations
37 Claims
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1. A displacement estimation system comprising:
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a data acquisition system; and
a processing system;
wherein the data acquisition system is configured to capture a first frame from a first substrate including a first pattern at a first time and capture a second frame from a second substrate including a second pattern at a second time subsequent to the first time, wherein the first pattern and the second pattern are substantially identical, and wherein the processing system is configured to calculate a displacement between the first pattern and the second pattern using the first frame and the second frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method comprising:
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capturing a first frame from a first substrate including a first pattern at a first time;
capturing a second frame from a second substrate including a second pattern that is substantially identical to the first pattern at a second time subsequent to the first time;
identifying the first pattern in the first frame;
identifying the second pattern in the second frame; and
calculating a displacement between the first pattern and the second pattern using the first frame and the second frame. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A system comprising:
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means for capturing a first frame from a first substrate including a first pattern at a first time;
means for capturing a second frame from a second substrate including a second pattern substantially identical to the first pattern at a second time subsequent to the first time; and
means for calculating a displacement between the first pattern and the second pattern using the first frame and the second frame. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A computer-readable medium having computer-executable instructions for performing a method of calculating a displacement, comprising:
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receiving a first frame including a first pattern embodied in a first substrate;
receiving a second frame including a second pattern substantially identical to the first pattern and embodied in a second substrate;
identifying the first pattern in the first frame;
identifying the second pattern in the second frame; and
calculating the displacement between the first pattern and the second pattern using the first frame and the second frame. - View Dependent Claims (35, 36, 37)
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Specification