Driving of an array of micro-electro-mechanical-system (mems) elements
First Claim
1. An electronic device comprising an array of micro-electromechanical system (MEMS) elements, said array providing a plurality of states at its output, wherein the MEMS elements each have a first state and a second state, and wherein a transition from the first to the second state is effected by an opening voltage, and a transition from the second to the first state is effected by a closing voltage, and the array comprises an input for a single control voltage that is applied to all the MEMS elements whereby the various states of the array are to be obtained by varying the single control voltage.
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Accused Products
Abstract
Method for driving an array of micro-electro mechanical system (MEMS) devices, said array providing a plurality of logical or memory states at it output, wherein the MEMS devices are given a characteristic hysteresis curve differing from one MEMS device to another MEMS device, and wherein a single control voltage applied to all the MEMS devices while the various states of the array are to be obtained by varying the single control voltage.
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Citations
12 Claims
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1. An electronic device comprising an array of micro-electromechanical system (MEMS) elements, said array providing a plurality of states at its output, wherein
the MEMS elements each have a first state and a second state, and wherein a transition from the first to the second state is effected by an opening voltage, and a transition from the second to the first state is effected by a closing voltage, and the array comprises an input for a single control voltage that is applied to all the MEMS elements whereby the various states of the array are to be obtained by varying the single control voltage.
Specification