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Polarizer for high-power deep UV radiation

  • US 20060050370A1
  • Filed: 09/07/2004
  • Published: 03/09/2006
  • Est. Priority Date: 09/07/2004
  • Status: Active Grant
First Claim
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1. A polarizing system for deep UV light comprising:

  • a substrate having a surface normal inclined between 65° and

    75°

    to a direction of propagation of an unpolarized beam of light having a nominal wavelengths less than 250 nm;

    an antireflective coating on the surface of the substrate that reflects no more than 2% of a first of two orthogonally related polarization components of the unpolarized beam of light;

    the antireflective coating also reflects at least 80% of a second of the two orthogonally related polarization components of the unpolarized beam of light; and

    an optical beam conveyor that routes a first portion of the unpolarized beam that is reflected from the antireflective coating as a substantially polarized beam intended for further propagation.

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