Embedded piezoelectric microcantilever sensors
First Claim
1. A microcantilever sensor comprising:
- a sensing material having at least one receptor bound to said sensing material that selectively binds an analyte, wherein said sensing material undergoes a volumetric change when brought into contact with said analyte;
a deflectable arm having a first end fixedly coupled to a substrate, and a second end capable of deflecting responsive to a volumetric change of the sensing material deposit; and
a detecting element which creates a detectable signal in response to the deflection of said arm.
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Accused Products
Abstract
An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever at least partially embedded within a sensing element. A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.
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Citations
45 Claims
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1. A microcantilever sensor comprising:
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a sensing material having at least one receptor bound to said sensing material that selectively binds an analyte, wherein said sensing material undergoes a volumetric change when brought into contact with said analyte;
a deflectable arm having a first end fixedly coupled to a substrate, and a second end capable of deflecting responsive to a volumetric change of the sensing material deposit; and
a detecting element which creates a detectable signal in response to the deflection of said arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 34, 35, 36, 37, 38, 39, 40, 45)
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21-33. -33. (canceled)
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41. A method for detecting an analyte within a medium, comprising:
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providing a deflectable microcantilever arm having a first end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;
forming a sensing material deposit adjacent to a second end of said arm;
binding a receptor material capable of selectively binding an analyte to said sensing material, such that said sensing material deposit is capable of a volumetric change responsive to the presence of said analyte, said volumetric change causing a deflection of said microcantilever arm;
measuring a control volume of said sensing material deposit by monitoring the deflection of said microcantilever arm in the absence of said analyte;
introducing a medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor; and
comparing the control volume to a measured volume in the presence of said medium by monitoring said deflection of said microcantilever arm. - View Dependent Claims (42, 43, 44)
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Specification