Apparatus of manufacturing display substrate and showerhead assembly equipped therein

• US 20060054280A1
• Filed: 02/23/2005
• Published: 03/16/2006
• Est. Priority Date: 02/23/2004
• Status: Abandoned Application

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Jang, Geun-Ha
• Application Number:
  US11/066,702
• Publication Number:
  US 20060054280A1
• Time in Patent Office: Days
• US Class Current: 156/345.340
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32532 Electrodes

Abstract

A showerhead assembly for used in a manufacturing apparatus for a display substrate is provided in the present invention. The showerhead assembly includes a backing plate having a gas inflow, a showerhead having a plurality of gas injection holes, a plurality of first connectors connecting the showerhead and the backing plate at edge portions thereof, and a plurality of second connectors connecting the showerhead and the backing plate in middle portions thereof.

Claims

1. A showerhead assembly for used in a manufacturing apparatus for a display substrate, comprising:

a backing plate having a gas inflow;

a showerhead having a plurality of gas injection holes;

a plurality of first connectors connecting the showerhead and the backing plate at edge portions thereof; and

a plurality of second connectors connecting the showerhead and the backing plate in middle portions thereof.

2. The showerhead assembly according to claim 1, wherein the gas inflow is formed in the middle of the backing plate and the plurality of second connectors are disposed around the gas inflow.

3. The showerhead assembly according to claim 1, wherein the first and second connectors are one of screws and bolts.

4. The showerhead assembly according to claim 1, further comprising a sealing cap on the backing plate to cover a head of each second connector.

5. The showerhead assembly according to claim 4, further comprising a sealant between the sealing cap and the backing plate.

6. The showerhead assembly according to claim 5, wherein the sealant is an O-ring.

7. The showerhead assembly according to claim 1, wherein the second connectors penetrate the backing plate and are screwed to the middle portion of the showerhead.

8. The showerhead assembly according to claim 7, further comprising a rubbery O-ring between the backing plated and a head of each second connector and a washer between the rubbery O-ring and the head of each second connector.

9. The showerhead assembly according to claim 7, further comprising an O-ring on the backing plate around a head of each second connector, and a sealing plate covering the O-ring and the head of each second connector, wherein the sealing plate is fastened to the backing plate by a plurality of screws.

10. The showerhead assembly according to claim 7, further comprising a first O-ring around the gas inflow and a second O-ring around the first O-ring, wherein the second connectors are disposed between the first and second O-rings around the gas inflow.

11. The showerhead assembly according to claim 10, further comprising a sealing plate covering the first and second O-rings and the second connectors, wherein the sealing plate is fastened to the backing plate by a plurality of first and second screws, wherein the plurality of first screws are disposed between the gas inflow and the first O-ring, and wherein the plurality of second screws are disposed in edge portions of the sealing plate outside the second O-ring.

12. The showerhead assembly according to claim 1, wherein each of the second connectors is integrally formed with the showerhead, and wherein each second connector extends from the showerhead to penetrate the backing plate and is screwed into a nut.

13. The showerhead assembly according to claim 12, further comprising a rubbery O-ring between the backing plated and the nut and a washer between the rubbery O-ring and the nut.

14. The showerhead assembly according to claim 12, further comprising an O-ring on the backing plate around the nut and a sealing plate covering the O-ring and the nut, wherein the sealing plate is fastened to the backing plate by a plurality of screws.

15. The showerhead assembly according to claim 12, further comprising a first O-ring around the gas inflow and a second O-ring around the first O-ring, wherein the second connectors and the nuts are disposed between the first and second O-rings around the gas inflow.

16. The showerhead assembly according to claim 15, further comprising a sealing plate covering the first and second O-rings and the nuts, wherein the sealing plate is fastened to the backing plate by a plurality of first and second screws, wherein the plurality of first screws are disposed between the gas inflow and the first O-ring, and wherein the plurality of second screws are disposed in edge portions of the sealing plate outside the second O-ring.

17. An apparatus of forming a display substrate, comprising:

a process chamber accommodating a susceptor;

a gas inflow pipe over the susceptor;

a backing plate having a gas inflow corresponding to the gate inflow pipe;

a showerhead disposed adjacent to the backing plate, the showerhead having a plurality of gate injection holes;

a first connector connecting the showerhead and the backing plate at an edge portion thereof; and

a second connector connecting the showerhead and the backing plate in a middle portion thereof.

18. The apparatus according to claim 17, wherein the process chamber includes a chamber body and an upper cover that are coupled together to form an airtight space therein, and wherein the upper cover have a gas inflow corresponding to the gate inflow pipe.

19. The apparatus according to claim 18, further comprising an insulator between the upper cover and the backing plate, and O-rings on top and bottom surfaces of the insulators.

20. The apparatus according to claim 17, further comprising a baffle between the shower head and the backing plate, wherein the second connector is one of screw and bolt and penetrates the baffle and the backing plate.