Exposure apparatus adapted to detect abnormal operating phenomenon
First Claim
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1. A wafer edge exposure apparatus, comprising:
- an edge exposing device adapted to expose an edge portion of a wafer loaded onto a rotatable support chuck under a body tube; and
, an interlock generator adapted to detect phenomenon in relation to at least one of the wafer and body tube, and further adapted to generate an interlock signal stopping operation of the wafer edge exposure apparatus upon detecting an abnormal phenomenon.
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Abstract
A wafer edge exposure apparatus and method of operation are disclosed. The apparatus includes an edge exposing device exposing an edge portion of a wafer loaded onto a rotatable support chuck under a body tube and an interlock generator generating an interlock signal stopping operation of the wafer edge exposure apparatus upon acoustically or optically detecting an abnormal phenomenon in relation to a wafer being processed and body tube.
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Citations
20 Claims
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1. A wafer edge exposure apparatus, comprising:
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an edge exposing device adapted to expose an edge portion of a wafer loaded onto a rotatable support chuck under a body tube; and
,an interlock generator adapted to detect phenomenon in relation to at least one of the wafer and body tube, and further adapted to generate an interlock signal stopping operation of the wafer edge exposure apparatus upon detecting an abnormal phenomenon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for monitoring abnormal operating phenomenon in a wafer edge exposure apparatus, comprising:
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detecting abnormal phenomenon associated with a wafer loaded onto a support chuck under a body tube; and
generating an interlock signal halting operation of the wafer edge exposure apparatus in response to a detected abnormal phenomenon. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification