×

Projection optical system and method

  • US 20060056064A1
  • Filed: 09/01/2005
  • Published: 03/16/2006
  • Est. Priority Date: 09/03/2004
  • Status: Active Grant
First Claim
Patent Images

1. A refractive projection optical system for imaging a first object into a region of a second object, the projection optical system comprising:

  • a plurality of lenses disposed along an imaging beam path of the projection optical system;

    wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between the first and second objects.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×