Projection optical system and method
First Claim
1. A refractive projection optical system for imaging a first object into a region of a second object, the projection optical system comprising:
- a plurality of lenses disposed along an imaging beam path of the projection optical system;
wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between the first and second objects.
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Abstract
A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical system; wherein the projection optical system is configured to have a numerical aperture on a side of the second object of greater than 1 wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between, the first and second objects.
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Citations
30 Claims
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1. A refractive projection optical system for imaging a first object into a region of a second object, the projection optical system comprising:
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a plurality of lenses disposed along an imaging beam path of the projection optical system;
wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between the first and second objects. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of manufacturing a microstructured device, comprising:
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a first imaging of a patterning structure into an intermediate image of; and
a second imaging of the intermediate image of the patterning structure into a region of a radiation sensitive substrate for exposing the radiation sensitive substrate;
wherein the first imaging and the second imaging is performed by using a refractive projection optical system. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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30. A refractive projection optical system, comprising:
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a compound lens system having a first refractive image former for forming a real intermediate image, and a second refractive image former, wherein said compound lens system is a micro-lithographic projection objective.
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Specification