Apparatus and method of monitoring operating parameters of a gas turbine
First Claim
1. ) A component for use in a combustion turbine, the component comprising:
- a substrate;
a MEMS device affixed to the substrate; and
at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to a termination location.
3 Assignments
0 Petitions
Accused Products
Abstract
A component for use in a combustion turbine (10) is provided that includes a substrate (212) and a microelectromechanical system (MEMS) device (50, 250) affixed to the substrate (212). At least one connector (52) may be deposited in electrical communication with the MEMS device (50, 250) for routing a data signal from the MEMS device (50, 250) to a termination location (59). A barrier coating (216) may be deposited on the substrate (212) wherein the MEMS device (50, 250) is affixed beneath a surface of the barrier coating (216). A plurality of trenches (142) may be formed in the barrier coating (216) at respective different depths below the surface of the barrier coating (216) and a MEMS device (50, 250) deposited within each of the plurality of trenches (142). A monitoring system (30) is provided that may include a processing module (34) programmed for receiving data from the MEMS device (50, 250).
113 Citations
25 Claims
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1. ) A component for use in a combustion turbine, the component comprising:
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a substrate;
a MEMS device affixed to the substrate; and
at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to a termination location. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. ) A turbine comprising:
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a turbine comprising a row of turbine blades and a row of ring segments circumscribing the row of blades;
a MEMS device affixed to a component within the turbine;
at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to a termination location;
a monitoring system comprising a processing module programmed for receiving data from the MEMS device; and
a transmitter for receiving the data signal from the termination location and transmitting the data signal to the monitoring system. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. ) A monitoring system for use with a turbine, the monitoring system comprising:
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at least one MEMS device configured for use with the turbine;
a processing module programmed to receive data from the at least one MEMS device and to develop information based on the received data; and
a transmitter for transmitting data from the at least one MEMS device to the processing module. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification