Sensor arrangement and method for operating a sensor arrangement
First Claim
1. A sensor arrangement having a plurality of sensor devices formed at least one of on or in a substrate, each of the sensor devices having:
- an electrical signal converter;
a sensor element coupled to the signal converter, in which the sensor element can be used to characteristically influence the electrical conductivity of the signal converter on account of a sensor event on the sensor element;
a device for keeping constant an electrical voltage present at the signal converter; and
a device for detecting the value of the electric current flowing through the signal converter as a sensor signal, wherein the electrical signal converter is a field-effect transistor having a gate terminal coupled to the sensor element, the device for keeping constant an electrical voltage keeps constant the electrical voltage between source and drain terminals of the field-effect transistor; and
the sensor arrangement further comprises a calibration device for calibrating a respective sensor device, the calibration device usable to bring a gate region of the field-effect transistor to an electrical calibration potential such that the electric current is independent of parameter fluctuations of the field-effect transistor.
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Accused Products
Abstract
A sensor arrangement and method of operating the sensor arrangement are described. The sensor arrangement has sensor devices formed on or in a substrate and a calibration device for calibrating a respective sensor device. Each sensor device has an electrical signal converter which is a field-effect transistor (FET) having a gate terminal coupled to a sensor element that is coupled to the signal converter, a device that keeps constant the electrical voltage between source and drain terminals of the FET, and a device for detecting the value of the electric current flowing through the signal converter. The sensor element characteristically influences the electrical conductivity of the signal converter on account of a sensor event on the sensor element. The calibration device brings the gate region of the FET to an electrical calibration potential such that the electric current is independent of parameter fluctuations of the FET.
94 Citations
17 Claims
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1. A sensor arrangement having a plurality of sensor devices formed at least one of on or in a substrate, each of the sensor devices having:
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an electrical signal converter;
a sensor element coupled to the signal converter, in which the sensor element can be used to characteristically influence the electrical conductivity of the signal converter on account of a sensor event on the sensor element;
a device for keeping constant an electrical voltage present at the signal converter; and
a device for detecting the value of the electric current flowing through the signal converter as a sensor signal, wherein the electrical signal converter is a field-effect transistor having a gate terminal coupled to the sensor element, the device for keeping constant an electrical voltage keeps constant the electrical voltage between source and drain terminals of the field-effect transistor; and
the sensor arrangement further comprises a calibration device for calibrating a respective sensor device, the calibration device usable to bring a gate region of the field-effect transistor to an electrical calibration potential such that the electric current is independent of parameter fluctuations of the field-effect transistor. - View Dependent Claims (4, 5, 6, 7, 9, 10, 11, 12, 13)
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2-3. -3. (canceled)
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8. (canceled)
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14. A method for operating a sensor arrangement:
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with a sensor arrangement having a plurality of sensor devices formed at least one of on or in a substrate, each of the sensor devices having;
an electrical signal converter;
a sensor element coupled to the signal converter, in which the sensor element can be used to characteristically influence the electrical conductivity of the signal converter on account of a sensor event on the sensor element;
a device for keeping constant an electrical voltage present at the signal converter;
a device for detecting the value of the electric current flowing through the signal converter as a sensor signal, wherein the electrical signal converter is a field effect transistor having a gate terminal coupled to the sensor element, the device for keeping constant an electrical voltage keeps constant the electrical voltage between source and drain terminals of the field-effect transistor;
in which case, in accordance with the method, the electrical conductivity of the signal converter is characteristically influenced on account of a sensor event on the sensor element;
the electrical voltage at the signal converter is kept constant;
the electric current flowing through the signal converter is detected as sensor signal; and
in which at least a portion of the sensor devices is calibrated by a gate region of the respective field-effect transistor being brought to an electrical calibration potential such that the value of the electric current in the case of a sensor event is independent of parameter fluctuations of the field-effect transistor. - View Dependent Claims (17)
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15-16. -16. (canceled)
Specification