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Method for preparation of semiconductive films

  • US 20060057766A1
  • Filed: 07/08/2003
  • Published: 03/16/2006
  • Est. Priority Date: 07/08/2003
  • Status: Abandoned Application
First Claim
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1. A process of preparing a semiconductive film comprising:

  • applying a solution containing a soluble polymer and a soluble metal precursor onto a substrate to form a polymer and metal containing layer thereon;

    treating said substrate including said polymer and metal containing layer for a time to form a coherent composite film;

    heating said substrate in an oxygen-containing atmosphere at temperatures characterized as sufficient to remove said polymer from said composite film and form a metal oxide film; and

    , reacting said metal oxide film with a sulfur-, selenium- or tellurium-containing gas under conditions sufficient to form a semiconductive film.

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