Polishing apparatus and method for producing semiconductors using the apparatus
First Claim
1. A polishing apparatus which imparts relative motion between a layer with a concave portion and a convex portion on a semiconductor wafer, comprising:
- a polishing tool comprising a grindstone and having a plane polishing surface to polish the surface of said semiconductor wafer by said plane polishing surface of said grindstone;
a dressing tool having a plane dressing surface for forming a surface roughness on the plane polishing surface of said grindstone;
a first moving means for imparting relative motion in a direction horizontal to the plane polishing surface of said grindstone between said dressing tool and said polishing tool;
a second moving means for moving said dressing tool in a direction vertical to the plane polishing surface of said grindstone; and
a control means for permitting to execute movement caused by said first moving means while controlling a position of said second moving means.
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Abstract
The present invention relates to a polishing apparatus, and a semiconductor manufacturing method using the apparatus. Dressing of a grindstone surface is ground by sizing processing whereby dressing of a tool surface can be done while preventing occurrence of cracks on the grindstone surface which is the cause for occurrence of scratches. Further, flatness of the surface of a dressing tool can be guaranteed because of sizing cutting-in; even if a thick grindstone of a few centimeters is used, the flatness can be maintained to the end; and processing with less in-face unevenness can be always carried out. Therefore, the life of the dressing tool can be greatly extended. Further, the present sizing-dressing is carried out jointly with processing of a wafer to thereby enable improvement of throughput of the apparatus as well as maintenance of a processing rate. The present apparatus and method are effective for planarization of various substrate surfaces having irregularities.
12 Citations
11 Claims
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1. A polishing apparatus which imparts relative motion between a layer with a concave portion and a convex portion on a semiconductor wafer, comprising:
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a polishing tool comprising a grindstone and having a plane polishing surface to polish the surface of said semiconductor wafer by said plane polishing surface of said grindstone;
a dressing tool having a plane dressing surface for forming a surface roughness on the plane polishing surface of said grindstone;
a first moving means for imparting relative motion in a direction horizontal to the plane polishing surface of said grindstone between said dressing tool and said polishing tool;
a second moving means for moving said dressing tool in a direction vertical to the plane polishing surface of said grindstone; and
a control means for permitting to execute movement caused by said first moving means while controlling a position of said second moving means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A polishing apparatus which imparts relative motion between a layer with a concave portion and a convex portion, comprising:
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a polishing tool comprising a grindstone and having a plane polishing surface to polish the surface of said semiconductor wafer by said plane polishing surface of said grindstone;
a dressing tool having a plane dressing surface for forming a surface roughness on the plane polishing surface of said grindstone; and
a means for inhibiting movement of said dressing tool in a direction vertical to the polishing surface of said grindstone.
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11. A method for manufacturing a semiconductor for effecting polishing-processing while pressing a thin film surface adhered to a surface of a semiconductor substrate formed with an irregularity pattern to the polishing surface of a grindstone for relative motion comprising:
forming a surface roughness with a dressing tool on the polishing surface of said grindstone, during a period between polishing processing or during the polishing process, while controlling a position of said dressing tool in a vertical direction with respect to said polishing surface.
Specification