Bellows with spring anti-gravity device

• US 20060060791A1
• Filed: 09/08/2004
• Published: 03/23/2006
• Est. Priority Date: 09/08/2004
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J.
• Granted Patent: US 7,087,906 B2
• Time in Patent Office: Days
• US Class Current: 250/441.110
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: H01J 2237/0216 Means for avoiding or correcting vibration effects
• CPC Class Codes: H01J 37/02 Details

Abstract

Embodiments of the present invention are directed to apparatus and methods of attenuating vibration, particularly for modern stepper machines and other types of vibration sensitive equipment. The attenuation system exhibits good vibration attenuation in the axial or support direction, and exhibits low or substantially zero lateral stiffness to prevent transmission of any vibrations between any of various portions of the machine. In one embodiment, an apparatus for attenuating transmission of lateral vibration between a first mass and a second mass comprises a vibration attenuation device including at least one bellows oriented along a support axis. The at least one bellows is connected between the first mass and the second mass and has an interior volume pressurized with a fluid to an internal fluid pressure which is greater than a zero-stiffness pressure such that the vibration attenuation device exhibits a negative lateral stiffness. A positive stiffness device is coupled between the first mass and the second mass. The positive stiffness device has a positive lateral stiffness which may be substantially equal to or greater than the negative lateral stiffness in magnitude.

Claims

1. An apparatus for supporting a second mass with respect to a first mass, the apparatus comprising:

a vibration attenuation device including at least one bellows oriented along a support axis, the at least one bellows connected between the first mass and the second mass and having an interior volume pressurized with a fluid to an internal fluid pressure which is greater than a zero-stiffness pressure such that the vibration attenuation device exhibits a negative lateral stiffness; and

a positive stiffness device coupled between the first mass and the second mass, the positive stiffness device having a positive lateral stiffness.

2. The apparatus of claim 1 wherein the vibration attenuation device includes a plurality of bellows, wherein at least one of the plurality of bellows has an internal fluid pressure greater than a zero-stiffness pressure to produce a negative lateral stiffness, and wherein the plurality of bellows have a combined lateral stiffness which is negative.

3. The apparatus of claim 1 wherein the positive stiffness device has a positive lateral stiffness which is substantially equal to or greater than the negative lateral stiffness in magnitude.

4. The apparatus of claim 3 wherein the positive stiffness device comprises a plurality of spring assemblies each having a lateral stiffness in a respective lateral direction generally perpendicular to the support axis, wherein at least two of the spring assemblies have lateral stiffnesses in two nonparallel lateral directions, and wherein the lateral stiffness of the positive stiffness device is equal to a combination of the lateral stiffnesses of the spring assemblies.

5. The apparatus of claim 4 wherein the positive stiffness device comprises a first spring assembly having a first positive lateral stiffness in a first lateral direction and a second spring assembly having a second positive lateral stiffness in a second lateral direction which is nonparallel to the first lateral direction.

6. The apparatus of claim 5 wherein the first lateral direction is substantially perpendicular to the second lateral direction.

7. The apparatus of claim 6 wherein the first positive lateral stiffness and the second positive lateral stiffness are substantially equal.

8. The apparatus of claim 4 wherein each spring assembly comprises at least one axial spring oriented in a lateral direction to provide the lateral stiffness in the lateral direction.

9. The apparatus of claim 8 wherein each spring assembly comprises two extension springs which are generally aligned with one another and connected with the second mass at two separate locations.

10. The apparatus of claim 4 wherein each spring assembly comprises at least one leaf spring attached to the first mass and connected with the second mass by a wire.

11. The apparatus of claim 1 wherein the positive stiffness device has a substantially zero stiffness along the support axis.

12. The apparatus of claim 1 wherein the vibration attenuation device has an axial stiffness along the support axis, and wherein a sum of the lateral stiffness of the vibration attenuation device and the lateral stiffness of the positive stiffness device is substantially equal to or less than the axial stiffness of the vibration attenuation device.

13. The apparatus of claim 12 wherein the axial stiffness of the vibration attenuation device is positive and substantially equal to zero.

14. The apparatus of claim 1 wherein the support axis is disposed along a direction of gravity.

15. The apparatus of claim 1 wherein the first mass comprises a support surface and the second mass comprises a support frame configured to support a lithographic exposure apparatus relative to the support surface.

16. The apparatus of claim 1 wherein the first mass comprises a base and the second mass comprises a platform configured to support a movable stage of a lithography system.

17. The apparatus of claim 1 wherein the first mass comprises a supporting stage of a lithographic system mounted to a frame and the second mass comprises a wafer stage.

18. An apparatus for supporting a second object with respect to a first object, the apparatus comprising:

a vibration attenuation device coupled between the first object and the second object to support the second object with respect to the first object along a support axis, the vibration attenuation device having a positive axial stiffness along the support axis and a negative lateral stiffness perpendicular to the support axis; and

a positive stiffness device coupled between the first object and the second object, the positive stiffness device having a positive lateral stiffness.

19. The apparatus of claim 18 wherein the vibration attenuation device comprises at least one bellows oriented along the support axis and having an interior volume pressurized with a fluid to an internal fluid pressure which is greater than a zero-stiffness pressure.

20. The apparatus of claim 18 wherein the axial stiffness of the vibration attenuation device is substantially equal to zero and the positive stiffness device has an axial stiffness along the support axis which is substantially equal to zero.

21. The apparatus of claim 18 wherein the positive stiffness device has an axial stiffness along the support axis, and wherein the combined lateral stiffness of the vibration attenuation device and the positive stiffness device is substantially equal to or smaller than a combined axial stiffness of the vibration attenuation device and the positive stiffness device in magnitude.

22. The apparatus of claim 18 wherein a combined lateral stiffness of the vibration attenuation device and the positive stiffness device is substantially equal to zero or greater than zero.

23. The apparatus of claim 22 wherein the positive stiffness device comprises a plurality of spring assemblies each having a lateral stiffness in a respective lateral direction generally perpendicular to the support axis, wherein at least two of the spring assemblies having lateral stifffnesses in two nonparallel lateral directions, and wherein the lateral stiffness of the positive stiffness device is equal to a combination of the lateral stiffnesses of the plurality of spring assemblies.

24. The apparatus of claim 23 wherein the plurality of spring assemblies have lateral stiffnesses along one of a first lateral direction and a second lateral direction which is substantially perpendicular to the first lateral direction.

25. The apparatus of claim 24 wherein a sum of the lateral stiffnesses of the spring assemblies in the first lateral direction is substantially equal to a sum of the lateral stifffnesses of the spring assemblies in the second lateral direction.

26. A method of supporting a second mass with respect to a first mass, the method comprising:

connecting a vibration attenuation device including at least one bellows between the first mass and the second mass, the bellows oriented along a support axis and having an interior volume;

pressurizing the interior volume of the bellows with a fluid to an internal fluid pressure which is greater than a zero-stiffness pressure such that the vibration attenuation device exhibits a negative lateral stiffness; and

coupling a positive stiffness device between the first mass and the second mass, the positive stiffness device having a positive lateral stiffness.

27. The method of claim 26 wherein a combined lateral stiffness of the vibration attenuation device and the positive stiffness device is substantially equal to zero or greater than zero.

28. The method of claim 27 wherein coupling the positive stiffness device comprises coupling a plurality of spring assemblies between the first mass and the second mass, wherein the spring assemblies each have a lateral stiffness in a respective lateral direction generally perpendicular to the support axis, wherein at least two of the spring assemblies having lateral stiffnesses in two nonparallel lateral directions, and wherein the lateral stiffness of the positive stiffness device is equal to a combination of the lateral stiffnesses of the plurality of spring assemblies.

29. The method of claim 28 wherein the plurality of spring assemblies have lateral stiffnesses along one of a first lateral direction and a second lateral direction which is substantially perpendicular to the first lateral direction.

30. The method of claim 28 wherein a sum of the lateral stiffnesses of the spring assemblies in the first lateral direction is substantially equal to a sum of the lateral stiffnesses of the spring assemblies in the second lateral direction.

31. The method of claim 26 wherein the support axis is disposed along a direction of gravity, and wherein the interior volume of the bellows is pressurized with a fluid to an internal fluid pressure to support a weight of the second mass with respect to the first mass.