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Inspection method and inspection equipment

  • US 20060061374A1
  • Filed: 12/09/2003
  • Published: 03/23/2006
  • Est. Priority Date: 12/12/2002
  • Status: Active Grant
First Claim
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1. A method of inspecting an electrical characteristic of a to-be-inspected object, comprising:

  • bringing pairs of probe pins into contact with respective electrodes of at least one to-be-inspected object;

    applying a voltage to the respective inspection electrodes via the pairs of probe pins by power supplies connected to the respective pairs of probe pins, thereby causing a fritting phenomenon to occur between tips of each pair included in the pairs of probe pins; and

    applying an inspection signal to the electrodes of the to-be-inspected object via the pairs of probe pins, thereby inspecting an electrical characteristic of the to-be-inspected object.

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