Stage assembly including a stage having increased vertical stroke

• US 20060061751A1
• Filed: 09/21/2004
• Published: 03/23/2006
• Est. Priority Date: 09/21/2004
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Yuan, Bausan, Teng, Ting-Chien
• Application Number:
  US10/945,638
• Publication Number:
  US 20060061751A1
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages

Abstract

A stage assembly (220) includes a stage base (202) having a guide surface (203), a first stage (206), a second stage (208), and a first mover subassembly (216) including a first mover (231) and a second mover (232) that are arranged in series. The stage base (202) supports the first stage (206), which moves relative to the stage base (202). The movers (231, 232) cooperate to move the second stage (208) relative to the first stage (206). The movers (231, 232) can include one or more attraction-only type actuators. The movers (231, 232) cooperate to move the second stage (208) along an axis that is substantially perpendicular to the guide surface (203). The stage assembly (220) can also include a second mover subassembly (216) that cooperates with the first mover subassembly (216) to move the second stage (208) with two or more degrees of freedom relative to the first stage (206). Further, the first mover (231) can directly move a portion of the second mover (232).

Claims

1. A stage assembly for positioning a device, the stage assembly comprising:

a first stage;

a second stage that supports the device, the second stage being supported by the first stage; and

a mover assembly that moves the second stage relative to the first stage, the mover assembly including a support mover and a first mover component that is coupled to the support mover, the support mover moving the first mover component to change a distance between the first mover component and one of the stages.

2. The stage assembly of claim 1 wherein the mover assembly moves the second stage in a direction that is substantially toward and away from the first stage.

3. The stage assembly of claim 1 wherein the first mover component is a part of an attraction-only type actuator that moves the second stage with one degree of freedom in a direction that is substantially toward and away from the first stage.

4. The stage assembly of claim 3 wherein the mover assembly includes a plurality of attraction-only type actuators that move the second stage with three degrees of freedom relative to the first stage.

5. The stage assembly of claim 3 wherein the mover assembly includes a voice coil motor that moves the second stage to change a distance between the first stage and the second stage.

6. The stage assembly of claim 5 wherein the mover assembly moves the second stage with three degrees of freedom relative to the first stage.

7. The stage assembly of claim 1 wherein the first mover component includes an E core that is coupled to the support mover.

8. The stage assembly of claim 7 wherein the mover assembly includes a second mover component that interacts with the first mover component to move the second stage, the second mover component being secured to the second stage.

9. The stage assembly of claim 8 wherein the second mover component includes an I core that moves substantially toward and away from the first stage.

10. The stage assembly of claim 1 wherein the support mover includes an angled mover surface and the mover assembly includes a component support having an angled support surface, the mover surface moving against the support surface to move a portion of the component support in a direction that is substantially away from the first stage.

11. The stage assembly of claim 10 wherein the first stage has a upper surface, and wherein at least one of the mover surface and the support surface has an angle with an absolute value that is approximately greater than 10 degrees and less than 80 degrees relative to the upper surface.

12. The stage assembly of claim 10 wherein the first stage has a upper surface, and wherein the mover surface and the support surface are angled relative to the upper surface, and wherein the sum of the angle of the mover surface and the angle of the support surface is greater than approximately 60 degrees and less than approximately 120 degrees.

13. The stage assembly of claim 10 wherein the first stage has a upper surface, and wherein the mover surface and the support surface are angled relative to the upper surface, and wherein the sum of the angle of the mover surface and the angle of the support surface is approximately 90 degrees.

14. The stage assembly of claim 1 further comprising a stage base that supports the first stage, wherein the first stage moves with three degrees of freedom relative to the stage base.

15. The stage assembly of claim 1 wherein the support mover includes a mover motor and a support mover carriage, the mover motor causing the support mover carriage to move in a first direction that moves the first mover component in a second direction that is different than the first direction.

16. The stage assembly of claim 1 further comprising a control system that directs current to the first mover component to control movement of the second stage in a direction that is substantially toward and away from the first stage.

17. The stage assembly of claim 16 further comprising a sensor, wherein the mover assembly includes a second mover component that cooperates with the first mover component to move the second stage relative to the first stage, the sensor monitoring a gap distance between the first mover component and the second mover component.

18. The stage assembly of claim 17 wherein the control system receives information from the sensor including the gap distance to control movement of the support mover.

19. The stage assembly of claim 16 further comprising a first sensor that monitors movement of the support mover relative to the component support.

20. The stage assembly of claim 19 wherein the mover assembly includes a component support that supports the first mover component, and wherein the control system receives information from the first sensor including movement of the support mover relative to the component support to control the amount of current that is directed to the first mover component.

21. The stage assembly of claim 20 further comprising a second sensor, and wherein the mover assembly includes a second mover component that cooperates with the first mover component to move the second stage relative to the first stage, the second sensor monitoring a gap distance between the first mover component and the second mover component.

22. The stage assembly of claim 21 wherein the control system receives information from the second sensor including the gap distance to control movement of the support mover.

23. A precision assembly including an illumination source and the stage assembly of claim 1 positioned near the illumination source.

24. A device manufactured with the precision assembly of claim 23.

25. A wafer on which an image has been formed by the precision assembly of claim 23.

26. A stage assembly for positioning a device, the stage assembly comprising:

a stage base having a guide surface;

a first stage that is supported by the stage base, the first stage moving relative to the guide surface;

a second stage that supports the device;

a first mover subassembly including a first mover and a second mover that are arranged in series, the movers cooperating to move the second stage relative to the first stage.

27. The stage assembly of claim 26 wherein one of the movers includes an attraction-only type actuator.

28. The stage assembly of claim 27 wherein the movers cooperate to move the second stage with one degree of freedom along an axis that is substantially perpendicular to the guide surface.

29. The stage assembly of claim 26 wherein the movers cooperate to move the second stage with three degrees of freedom relative to the first stage.

30. The stage assembly of claim 26 further comprising a second mover subassembly that cooperates with the first mover subassembly to move the second stage with three degrees of freedom relative to the first stage.

31. The stage assembly of claim 26 further comprising a voice coil motor that moves the second stage to change a distance between the first stage and the second stage.

32. The stage assembly of claim 31 wherein the voice coil motor moves the second stage with three degrees of freedom relative to the first stage.

33. The stage assembly of claim 26 wherein the first mover directly moves a portion of the second mover.

34. The stage assembly of claim 26 wherein the first mover is secured to the first stage and the second mover is secured to the second stage.

35. The stage assembly of claim 26 wherein the second mover moves the second stage relative to the first mover.

36. The stage assembly of claim 26 wherein the first mover includes (i) a first mover component having an angled mover surface, and (ii) a second mover component having an angled support surface, and wherein the mover surface moves against the support surface to move a portion of the second mover component in a direction that is substantially away from the first stage.

37. The stage assembly of claim 26 wherein the first stage moves with three degrees of freedom relative to the guide surface.

38. The stage assembly of claim 26 wherein a portion of the first mover is secured to a portion of the second mover.

39. The stage assembly of claim 26 wherein the first mover moves a portion of the second mover along an axis that is substantially perpendicular to the guide surface.

40. The stage assembly of claim 39 wherein the second mover moves the second stage along an axis that is substantially perpendicular to the guide surface.

41. The stage assembly of claim 26 further comprising a control system that directs current to the first mover subassembly to control movement of the second stage along an axis that is substantially perpendicular to the guide surface.

42. The stage assembly of claim 26 further comprising a first sensor, wherein the first mover includes an attraction-only type actuator having a first mover component and a second mover component, the sensor monitoring a gap distance between the first mover component and the second mover component.

43. The stage assembly of claim 42 wherein the control system receives information from the sensor including the gap distance to control movement of the second mover.

44. The stage assembly of claim 42 further comprising a second sensor, wherein the second mover includes a first mover component and a second mover component, and wherein the control system receives information from the second sensor including movement of the first mover component of the second mover relative to the second mover component of the second mover to control the amount of current that is directed to one of the movers.

45. A precision assembly including an illumination source and the stage assembly of claim 26 positioned near the illumination source.

46. A device manufactured with the precision assembly of claim 45.

47. A wafer on which an image has been formed by the precision assembly of claim 45.

48. A stage assembly for positioning a device, the stage assembly comprising:

a stage base having a guide surface;

a device table that is supported by the stage base, the device table supporting the device; and

a first mover subassembly including a first mover and a second mover that are positioned in series, the movers cooperating to move the device table along an axis that is substantially perpendicular to the guide surface.

49. The stage assembly of claim 48 wherein one of the movers includes an attraction-only type actuator.

50. The stage assembly of claim 48 wherein the movers cooperate to move the device table with three degrees of freedom relative to the guide surface.

51. The stage assembly of claim 48 further comprising a second mover subassembly that cooperates with the first mover subassembly to move the device table with three degrees of freedom relative to the guide surface.

52. The stage assembly of claim 48 further comprising a voice coil motor that moves the device table to change a distance between the guide surface and the device table.

53. The stage assembly of claim 52 wherein the voice coil motor moves the device table with three degrees of freedom relative to the guide surface.

54. The stage assembly of claim 48 wherein the first mover directly moves a portion of the second mover.

55. The stage assembly of claim 48 wherein the second mover moves the device table relative to the first mover.

56. The stage assembly of claim 48 wherein the first mover includes (i) a first mover component having an angled mover surface, and (ii) a second mover component having an angled support surface, and wherein the mover surface moves against the support surface to move a portion of the second mover component along an axis that is substantially perpendicular to the guide surface.

57. The stage assembly of claim 48 wherein a portion of the first mover is secured to a portion of the second mover.

58. The stage assembly of claim 48 wherein the first mover moves a portion of the second mover along an axis that is substantially perpendicular to the guide surface.

59. The stage assembly of claim 58 wherein the second mover moves the device table along an axis that is substantially perpendicular to the guide surface.

60. The stage assembly of claim 48 further comprising a control system that directs current to the first mover subassembly to control movement of the device table along an axis that is substantially perpendicular to the guide surface.

61. The stage assembly of claim 48 further comprising a first sensor, wherein the first mover includes an attraction-only type actuator having a first mover component and a second mover component, the sensor monitoring a gap distance between the first mover component and the second mover component.

62. The stage assembly of claim 61 wherein the control system receives information from the sensor including the gap distance to control movement of the second mover.

63. The stage assembly of claim 61 further comprising a second sensor, wherein the second mover includes a first mover component and a second mover component, and wherein the control system receives information from the second sensor including movement of the first mover component of the second mover relative to the second mover component of the second mover to control the amount of current that is directed to one of the movers.

64. A precision assembly including an illumination source and the stage assembly of claim 48 positioned near the illumination source.

65. A device manufactured with the precision assembly of claim 64.

66. A wafer on which an image has been formed by the precision assembly of claim 64.

67. A method for positioning a device, the method comprising the steps of:

supporting a first stage with a stage base having a guide surface;

moving the first stage relative to the guide surface;

supporting the device with a second stage; and

moving the second stage relative to the first stage with a first mover and a second mover that are arranged in series.

68. The method of claim 67 wherein the step of moving the second stage includes using the first mover to move a portion of the second mover.

69. The method of claim 67 wherein the step of moving the second stage includes moving the second stage along an axis that is substantially perpendicular to the guide surface.

70. The method of claim 67 wherein the step of moving the second stage includes using an attraction-only type actuator.

71. The method of claim 67 wherein the step of moving the second stage includes using the movers to move the second stage with three degrees of freedom relative to the first stage.

72. The method of claim 67 further comprising the step of moving the second stage relative to the first stage with a voice coil motor along an axis that is substantially perpendicular to the guide surface.

73. The method of claim 67 wherein the step of moving the second stage includes securing the first mover to the first stage and securing the second mover to the second stage.

74. The method of claim 67 wherein the step of moving the second stage includes using the second mover to move the second stage relative to the first mover.

75. The method of claim 67 wherein the step of moving the first stage includes moving the first stage with three degrees of freedom relative to the guide surface.

76. The method of claim 67 wherein the step of moving the second stage includes securing a portion of the first mover to a portion of the second mover.

77. The method of claim 67 wherein the step of moving the second stage includes using the first mover to move a portion of the second mover along an axis that is substantially perpendicular to the guide surface.

78. The method of claim 77 wherein the step of moving the second stage includes using the second mover to move the second stage along an axis that is substantially perpendicular to the guide surface.

79. The method of claim 67 wherein the step of moving the second stage includes directing current to the first mover to control movement of the second stage along an axis that is substantially perpendicular to the guide surface.

80. The method of claim 67 wherein the step of moving the second stage includes monitoring a gap distance between a first mover component of the first mover and a second mover component of the first mover with a first sensor, and controlling movement of the second mover based at least partly on the gap distance.

81. The method of claim 80 wherein the step of moving the second stage includes monitoring movement of a first mover component of the second mover relative to a second mover component of the second mover with a second sensor, and directing current to one of the movers based at least partly on the movement monitored by the second sensor.

82. A method for making an exposure apparatus for transferring an image onto the device, the method comprising the steps of:

providing an illumination system that directs an illumination beam at the reticle; and

positioning the device utilizing the method of claim 67.

83. A method for making the device utilizing the apparatus made by the method of claim 82.

84. A method of making a wafer utilizing the apparatus made by the method of claim 82.