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Stage assembly including a stage having increased vertical stroke

  • US 20060061751A1
  • Filed: 09/21/2004
  • Published: 03/23/2006
  • Est. Priority Date: 09/21/2004
  • Status: Abandoned Application
First Claim
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1. A stage assembly for positioning a device, the stage assembly comprising:

  • a first stage;

    a second stage that supports the device, the second stage being supported by the first stage; and

    a mover assembly that moves the second stage relative to the first stage, the mover assembly including a support mover and a first mover component that is coupled to the support mover, the support mover moving the first mover component to change a distance between the first mover component and one of the stages.

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