Methods, systems, and carrier media for evaluating reticle layout data

• US 20060062445A1
• Filed: 09/14/2005
• Published: 03/23/2006
• Est. Priority Date: 09/14/2004
• Status: Active Grant

• Current Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Original Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Inventors: Glasser, Lance, Verma, Gaurav, Preil, Moshe E.
• Granted Patent: US 7,689,966 B2
• Time in Patent Office: Days
• US Class Current: 382/144
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G06F 30/39 Circuit design at the physical level physical level design for reconfigurable circuits G06F30/347

Abstract

Various computer-implemented methods are provided. One method for evaluating reticle layout data includes generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process. The simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process. The method also includes determining manufacturability of the reticle layout data using the simulated image. The manufacturability is a measure of how accurately the features will be formed on the reticle. Also provided are various carrier media that include program instructions executable on a computer system for performing a method for evaluating reticle layout data as described herein. In addition, systems configured to evaluate reticle layout data are provided. The systems include a computer system and a carrier medium that includes program instructions executable on the computer system for performing method(s) described herein.

Claims

1. A computer-implemented method for evaluating reticle layout data, comprising:

generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process; and

determining manufacturability of the reticle layout data using the simulated image, wherein the manufacturability is a measure of how accurately the features will be formed on the reticle.

2. The method of claim 1, wherein said determining comprises applying design rule checks to the simulated image.

3. The method of claim 1, wherein said determining comprises comparing the simulated image to the reticle layout data.

4. The method of claim 1, wherein said determining comprises analyzing different portions of the simulated image based on designer intent data associated with the different portions.

5. The method of claim 1, further comprising altering the reticle layout data with reticle processing biases prior to said generating.

6. The method of claim 1, wherein the model is specific to a reticle writing tool that will be used to perform the reticle manufacturing process.

7. The method of claim 1, further comprising altering the model using data measured on reticles fabricated using the reticle manufacturing process.

8. The method of claim 1, further comprising determining inspectability of the reticle layout data using the simulated image.

9. The method of claim 8, wherein said determining the inspectability comprises determining an approximate signal-to-noise ratio that data produced by inspection of the reticle will have.

10. The method of claim 8, wherein said determining the inspectability comprises determining a defect size that is the smallest that an inspection tool could detect on the reticle.

11. The method of claim 8, wherein said determining the inspectability comprises analyzing different portions of the simulated image based on designer intent data associated with the different portions.

12. The method of claim 8, further comprising performing said generating for different parameters of the reticle manufacturing process, wherein said determining the inspectability is performed for different simulated images generated with the different parameters.

13. The method of claim 12, wherein the different parameters comprise different reticle writing tools.

14. The method of claim 13, further comprising selecting one of the different reticle writing tools that could produce reticles with higher inspectability than another of the different reticle writing tools.

15. The method of claim 1, further comprising determining printability of the reticle layout data using the simulated image.

16. The method of claim 15, wherein said determining the printability comprises generating an additional simulated image that illustrates how the features of the reticle will be printed on a wafer by a lithography process.

17. The method of claim 16, wherein said determining the printability further comprises applying design rule checks to the additional simulated image.

18. The method of claim 16, wherein said determining the printability further comprises applying optical rule checks to the additional simulated image.

19. The method of claim 16, wherein said determining the printability further comprises comparing the additional simulated image to an ideal image of the features and locating errors in the additional simulated image by comparing edge placement of individual features in the additional simulated image to edge placement of corresponding features in the ideal image.

20. The method of claim 16, wherein said determining the printability further comprises analyzing different portions of the additional simulated image based on designer intent data associated with the different portions.

21. The method of claim 15, wherein said determining the printability comprises generating additional simulated images that illustrate how the features of the reticle will be printed on a wafer by a lithography process at different process parameters.

22. The method of claim 21, wherein the different process parameters comprise different types of lithography exposure tools.

23. The method of claim 15, wherein said determining the printability comprises generating an additional simulated image that illustrates how the features of the reticle will be printed on a wafer by a lithography process using the simulated image as input to a lithography process model, the method further comprising altering the lithography process model using data measured on wafers printed using the lithography process.

24. The method of claim 1, wherein the simulated image further illustrates how all of the features of the reticle layout data will be formed on the reticle.

25. The method of claim 1, wherein the reticle layout data comprises optical proximity correction feature data, aberration correction feature data, phase shift feature data, or a combination thereof.

26. The method of claim 1, further comprising altering one or more parameters of the reticle manufacturing process to generate one or more revised reticle manufacturing processes, performing said generating and said determining for the one or more revised reticle manufacturing processes, and determining which of the one or more revised reticle manufacturing processes provides the largest improvement in the manufacturability of the reticle layout data.

27. The method of claim 26, wherein the one or more parameters comprise different types of mask writing tools.

28. The method of claim 1, wherein said determining comprises identifying defects in the reticle layout data based on the simulated image.

29. The method of claim 28, further comprising allowing a user to review the defects and to alter the reticle layout data to correct the defects.

30. The method of claim 28, further comprising altering the reticle layout data to correct the defects.

31. A carrier medium, comprising program instructions executable on a computer system for performing a method for evaluating reticle layout data, wherein the method comprises:

generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process; and

determining manufacturability of the reticle layout data using the simulated image, wherein the manufacturability is a measure of how accurately the features will be formed on the reticle.

32. A system configured to evaluate reticle layout data, comprising:

a computer system; and

a carrier medium comprising program instructions executable on the computer system for;

generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process; and

determining manufacturability of the reticle layout data using the simulated image, wherein the manufacturability is a measure of how accurately the features will be formed on the reticle.