Fabrication of optical confinements
First Claim
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1. A method of fabricating an optical confinement that comprises a cladding surrounding a core, comprising:
- (a) providing a substrate coated with a layer of photoresist;
(b) patterning said layer of photoresist to define boundaries of said core;
(c) removing said layer of photoresist surrounding said defined boundaries so that a sufficient amount of photoresist remains to occupy said core;
(d) depositing a layer of cladding material over said remaining photoresist and said substrate;
(e) removing at least a portion of said cladding material deposited over said remaining photoresist; and
(f) removing said photoresist of step (e) to form said core surrounded by said cladding of said optical confinement.
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Abstract
The present invention relates to optical confinements, methods of preparing and methods of using them for analyzing molecules and/or monitoring chemical reactions. The apparatus and methods embodied in the present invention are particularly useful for high-throughput and low-cost single-molecular analysis.
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Citations
32 Claims
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1. A method of fabricating an optical confinement that comprises a cladding surrounding a core, comprising:
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(a) providing a substrate coated with a layer of photoresist;
(b) patterning said layer of photoresist to define boundaries of said core;
(c) removing said layer of photoresist surrounding said defined boundaries so that a sufficient amount of photoresist remains to occupy said core;
(d) depositing a layer of cladding material over said remaining photoresist and said substrate;
(e) removing at least a portion of said cladding material deposited over said remaining photoresist; and
(f) removing said photoresist of step (e) to form said core surrounded by said cladding of said optical confinement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification