Method for producing a mirror from a titanium-based material, and a mirror made from such a material
First Claim
1. Method for producing a mirror (10) from a titanium-based material having a shape accuracy and having a surface roughness in the submicrometer region by using the technique of ultraprecision machining, comprising utilizing ultraprecision machining to produce a prescribed basic shape (11) from the material, and reducing the surface roughness and producing a reflecting surface (12) the basic shape (11) is polished with a polishing body that has a lesser hardness than the material, whereby the shape accuracy is retained.
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Accused Products
Abstract
A method for producing a mirror (10) from a titanium-based material by using the technique of ultraprecision machining. The mirror produced using this method has both a shape accuracy and a surface roughness in the submicrometer region. The mirror (10) is made from a titanium-based material having a shape accuracy and a surface roughness in the submicrometer region, whose basic shape (11) has a has a reflecting surface (12) having a surface roughness of less than 60 nm, and in particular of less than 30 nm.
16 Citations
11 Claims
- 1. Method for producing a mirror (10) from a titanium-based material having a shape accuracy and having a surface roughness in the submicrometer region by using the technique of ultraprecision machining, comprising utilizing ultraprecision machining to produce a prescribed basic shape (11) from the material, and reducing the surface roughness and producing a reflecting surface (12) the basic shape (11) is polished with a polishing body that has a lesser hardness than the material, whereby the shape accuracy is retained.
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7. Method according to claim 7, wherein the graininess of the polishing agents used decreases from stage to stage.
- 9. Mirror (10) made from a titanium-based material having a shape accuracy and having a surface roughness in the submicrometer region, said mirror having a basic shape (11) with a reflecting surface (12) that has a surface roughness of less than 60 nm.
Specification