Semiconductor-insulator-semiconductor structure for high speed applications
First Claim
Patent Images
1. A semiconductor-insulator-semiconductor device comprising:
- a lower semiconductor layer laterally bounded by lateral isolation regions;
an upper semiconductor layer, having a first portion that at least partially overlaps the lower semiconductor layer and a second portion that at least partially overlaps a lateral isolation region; and
a central dielectric region located between the lower semiconductor layer and the first portion of the upper semiconductor layer, wherein the central dielectric region is nitridized.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor-insulator-semiconductor (SIS) device is presented along with a device for fabricating the same. The SIS device includes a lower semiconductor layer, an upper semiconductor layer, and a central insulating layer located between the overlapping portions of the lower semiconductor layer and the upper semiconductor layer. The central insulating layer is nitridized in order to make the layer less permeable to dopant species and to therefore minimize dopant cross-diffusion. Subsequently the switching characteristics of the SIS device are optimized when the SIS device is used as, for example, an integrated optical modulator.
96 Citations
21 Claims
-
1. A semiconductor-insulator-semiconductor device comprising:
-
a lower semiconductor layer laterally bounded by lateral isolation regions;
an upper semiconductor layer, having a first portion that at least partially overlaps the lower semiconductor layer and a second portion that at least partially overlaps a lateral isolation region; and
a central dielectric region located between the lower semiconductor layer and the first portion of the upper semiconductor layer, wherein the central dielectric region is nitridized. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A method for creating a semiconductor-insulator-semiconductor device comprising:
-
providing an active semiconductor layer on an insulating substrate;
etching portions of the active semiconductor layer to create a laterally isolated lower semiconductor layer;
forming lateral isolation regions that laterally bound the lower semiconductor layer;
forming a central dielectric region over a first portion of the lower semiconductor layer, wherein the central dielectric region is nitridized; and
forming an upper semiconductor layer that at least overlaps the lower semiconductor layer, such that the central dielectric region forms the interface between the upper semiconductor layer and the lower semiconductor layer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
-
Specification