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Dynamic creation and modification of wafer test maps during wafer testing

  • US 20060064268A1
  • Filed: 11/03/2005
  • Published: 03/23/2006
  • Est. Priority Date: 04/17/2003
  • Status: Abandoned Application
First Claim
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1. A dynamic wafer testing system, comprising:

  • a data store of patterns associated with testing maps; and

    a test station controller that dynamically creates one or more of the testing maps associated with a number of the patterns that are detected on sites to be tested on a lot of wafers, and wherein the test station controller can process a number of the dynamically created one or more testing maps in parallel.

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