Method and system for detecting leak in electronic devices

• US 20060065043A1
• Filed: 03/25/2005
• Published: 03/30/2006
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: William Cummings
• Inventors: Cummings, William
• Granted Patent: US 7,299,681 B2
• Time in Patent Office: Days
• US Class Current: 73/40.700
• CPC Class Codes: G01M 3/229 removably mounted in a test cell
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Disclosed are methods and systems for testing electronic devices for leak detection, wherein the test does not destroy the electronic devices. In one method of detecting a leak in a sealed package, a sealed package is placed in a test gas environment, thereby allowing the test gas to diffuse into an internal space of the sealed package through a leak formed in the sealed package. Thereafter, the sealed package is placed in an environment substantially free of the test gas and allowing the test gas to diffuse out of the internal space. The amount of the test gas in the test gas-free environment is detected. Based on the information obtained from the detection, it is determined whether the sealed package has one or more unintended leaks based on information obtained from the detecting.

Claims

1. A method of detecting a leak in an electronic device, comprising:

providing an electronic device having an interior space;

placing the electronic device in a test gas environment comprising a test gas, wherein the electronic device is substantially free of the test gas;

placing the electronic device in a non-test gas environment substantially free of the test gas; and

detecting the test gas while the electronic device is placed in the non-test gas environment.

2. The method of claim 1, wherein the electronic device comprises a leak, wherein the test gas diffuses into the interior space when the electronic device is in the test gas environment, and wherein the test gas diffuses out of the interior space when the electronic device is in the non-test gas environment.

3. The method of claim 1, wherein the test gas environment has a pressure that is non-destructive to the electronic device.

4. The method of claim 2, wherein the non-destructive pressure is from about 0.8 atm to about 1.2 atm.

5. The method of claim 1, wherein the non-test gas environment has a pressure that is non-destructive to the electronic device.

6. The method of claim 5, wherein the non-destructive pressure is from about 0.8 atm to about 1.2 atm.

7. The method of claim 1, wherein detecting leakage comprises sensing existence of the test gas in the non-test gas environment that has leaked out of the electronic device.

8. The method of claim 1, wherein detecting leakage comprises measuring an amount of the test gas existing in the non-test gas environment.

9. The method of claim 1, wherein detecting leakage comprises monitoring a relative amount of the test gas in the non-test gas environment over time.

10. The method of claim 1, wherein detecting leakage comprises sensing existence of the test gas within the electronic device.

11. The method of claim 10, wherein sensing existence of the test gas within the electronic device comprises:

applying radiation of light to the electronic device; and

detecting a response of the test gas to the radiation.

12. The method of claim 11, wherein the light is UV, and wherein the test gas emits visible light when exposed to the UV.

13. The method of claim 11, wherein the light is a laser beam, and wherein the test gas absorbs the laser beam.

14. The method of claim 13, wherein detecting a response comprises measuring reduction of intensity of the laser beam.

15. The method of claim 11, wherein radiation of light is applied to a portion of the electronic device that is transparent to the light.

16. The method of claim 10, wherein sensing existence of the test gas within the electronic device comprises:

applying energy particles to the electronic device, wherein the test gas involves in a nuclear reaction with the energy particle; and

detecting radiation resulting from the nuclear reaction.

17. The method of claim 10, wherein detecting leakage comprises measuring a relative amount of the test gas within the electronic device.

18. The method of claim 1, further comprising determining whether the electronic device has an unintended leak based on the detection.

19. The method of claim 1, wherein the test gas environment is created by flowing the test gas through an area where the electronic device is placed.

20. The method of claim 1, wherein the non-test gas environment is created in a closed chamber substantially free of the test gas.

21. The method of claim 1, wherein the non-test gas environment is created by flowing a non-test gas through an area where the electronic device is placed.

22. The method of claim 1, wherein the test gas environment and the non-test gas environment are created in a single chamber.

23. The method of claim 1, wherein the test gas environment is created in a first chamber, and wherein the non-test gas environment are created in a second chamber.

24. The method of claim 1, wherein the test gas comprises neither N₂ nor O₂.

25. A method of detecting a leak in an electronic device, comprising:

maintaining an electronic device in a filling chamber containing a test gas, the electronic device is substantially free of a gas;

transferring the electronic device into an inspection chamber substantially free of the test gas; and

detecting the test gas existing in the inspection chamber while maintaining the electronic device in the inspection chamber.

26. The method of claim 25, wherein a partial pressure of the test gas in the test gas environment is substantially constant for an extended period.

27. The method of claim 25, wherein the test gas is in a gaseous phase at room temperature.

28. The method of claim 25, wherein the test gas is chosen from the group consisting of He, Ne, Ar and SF₆.

29. A method of detecting a leak in an electronic device, comprising:

providing an electronic device in a chamber;

supplying a test gas to the chamber to create a test gas environment within the chamber;

flushing the test gas out of the chamber;

supplying a non-test gas to the chamber to create a non-test gas environment within the chamber; and

detecting the test gas existing in the non-test gas environment.

30. The method of claim 29, wherein the test gas comprises a noble gas.

31. The method of claim 29, wherein the test gas is substantially non-reactive with a desiccant.

32. The method of claim 29, wherein the electronic device is substantially hermetically sealed with regard to water vapor.

33. The method of claim 29, wherein the electronic device is substantially permeably sealed with regard to water vapor.

34. An electronic device inspected by a method of detecting a leak, the method comprising:

placing the electronic device in a test gas environment comprising a test gas, wherein the electronic device is substantially free of the test gas;

placing the electronic device in a non-test gas environment substantially free of the test gas; and

detecting the test gas while the electronic device is placed in the non-test gas environment.

35. A system for testing an electronic device for leakage, comprising:

a filling chamber connected to a supply of a test gas so as to create a test gas environment therein;

a inspection chamber connected to a supply of a non-test gas so as to create a non-test gas environment therein, wherein the inspection chamber not connected to a supply of the test gas; and

a test gas sensor connected the inspection chamber and configured to detect the test gas existing in the inspection chamber or flowing out of the inspection chamber.

36. The system of claim 35, wherein the filling chamber comprises a controller for the supply of the test gas to maintain a substantially constant partial pressure of the test gas in the filling chamber.

37. The system of claim 35, further comprising a processor configured to determine from data of the test gas detected by the sensor whether there is leak in an electronic device under test.

38. A system for testing an electronic device for leakage, comprising:

a test chamber;

a supply of a test gas connected to the test chamber and configured to supply the test gas into the test chamber;

a supply of a non-test gas connected to the chamber and configured to supply the non-test gas into the test chamber; and

a test gas sensor connected to the test chamber and configured to detect the test gas existing in the test chamber or flowing out of the inspection chamber.

39. The system of claim 38, further comprising a processor configured to determine from data of the test gas detected by the sensor whether there is leak in an electronic device under test.

40. The system of claim 38, further comprising a controller for controlling supplies of the test gas and the non-test gas into the test chamber, and wherein the controller configured to flush out of the test chamber a gaseous content therein.

41. A system for testing an electronic device for leakage, comprising:

means for providing a test gas environment, which comprises a test gas;

means for creating a non-test gas environment that is substantially free of the test gas; and

means for detecting the test gas when a device under test is in the non-test gas environment.