Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring

• US 20060065045A1
• Filed: 09/30/2004
• Published: 03/30/2006
• Est. Priority Date: 09/30/2004
• Status: Active Grant

• Current Assignee: Teledyne Scientific & Imaging, LLC (Teledyne Technologies Incorporated)
• Original Assignee: Rockwell Scientific Licensing LLC
• Inventors: DeNatale, Jeffrey F., Stupar, Philip A., Borwick, Robert L. III
• Granted Patent: US 7,287,415 B2
• Time in Patent Office: Days
• US Class Current: 73/54.230
• CPC Class Codes: G01N 11/16 by measuring damping effect upon oscillatory body
• CPC Class Codes: G01N 33/30 for lubricating properties

Abstract

Embodiments of the present invention are directed to a MEM viscosity sensor that is configured to be operated submerged in a liquid. The MEMS viscosity sensor comprises a MEMS variable capacitor comprising a plurality of capacitor plates capable of being submerged in a liquid. An actuator places a driving force on the variable capacitor which causes relative movement between the plates, where the movement creates a shear force between each moving plate and the liquid, which damps the movement of the plate and increases the capacitor'"'"'s response time to the applied force in accordance with the liquid'"'"'s viscosity. To determine the actual viscosity of the liquid, a sensor is coupled to the variable capacitor for sensing the response time of the plates as an indicator of the liquid'"'"'s viscosity.

Claims

1. A micro-electromechanical system (MEMS) capable of being submerged in a liquid, comprising:

a substrate;

a capacitor comprising;

first and second thin sets of conductive plates spaced apart from each other and having parallel respective surface areas, the first set of plates being configured to interleave with the second set of plates such that their surface areas at least partially overlap to produce a capacitance which varies with the amount of overlap, at least one of said sets of plates being moveable to vary said overlap, said surface of said plates providing predominantly shear interaction with said liquid; and

a motion actuator carried by said substrate coupled to move said at least one set of plates.

2. The MEMS of claim 1, wherein said capacitor is a comb capacitor.

3. The MEMS of claim 1, further comprising a drive actuator, coupled to move at least one of said set of plates parallel to the other sets of plates to vary said overlap.

4. The MEMS of claim 3, wherein the drive actuator is a Lorentz actuator.

5. The MEMS of claim 3, wherein the drive actuator is an electrostatic actuator.

6. The MEMS of claim 3, wherein the drive actuator is selected from a group consisting of an electromagnetic actuator, piezoelectric actuator, or thermal actuator.

7. The MEMS of claim 1, further comprising a sensor which senses the rate of capacitance change.

8. The MEMS of claim 7 where the rate of capacitance change in measured at the steepest part of the slope to minimize error.

9. The MEMS of claim 1, wherein said sets of plates are immersed, a shear force being created between the surfaces of the moving plates and the liquid, wherein the rate of change of capacitance is related to said shear force.

10. A MEMS in claim 9, further comprising a sensor which senses the rate of capacitance change as an indication of the liquid'"'"'s viscosity.

11. A MEMS as in claim 1, further comprising an additional sensor for sensing at least one liquid parameter.

12. A MEMS as in claim 11, wherein the additional sensor is selected from a group consisting of a dielectric sensor, a temperature sensor, a conductivity sensor, and a pH sensor.

13. A MEMS as in claim 11, wherein the additional sensor is an integrated temperature sensor.

14. A MEMS as in claim 11, wherein the additional sensor is an integrated interdigitated fixed capacitor for electrochemical sensing.

15. A micro-electromechanical system (MEMS) viscosity sensor, comprising:

a MEMS variable capacitor comprising a plurality of capacitor plates capable of being submerged in a liquid;

an actuator for placing a driving force on the variable capacitor which causes relative movement between said plates;

said movement creating a shear force between each moving plate and said liquid which damps the movement of said plate and increases the capacitor'"'"'s response time to said force in accordance with the liquid'"'"'s viscosity; and

a sensor coupled to the variable capacitor for sensing said response time as an indicator of the liquid'"'"'s viscosity.

16. The MEMS of claim 15, wherein said sensor indicates the liquid'"'"'s viscosity in relation to a reference viscosity and a corresponding reference response time.

17. The MEMS of claim 15, wherein said actuator varies the relative overlay between said plates and thus the capacitance of said capacitor, and said sensor senses the change in said capacitance as a function of time to sense said response time.

18. A micro-electromechanical system (MEMS), comprising:

a substrate;

a moveable suspension system carried by said substrate;

a variable comb capacitor having two sets of interdigitated plates;

a support holding one of said sets of plates stationary with respect to said substrate;

a connector coupling the other of said sets of plates to move with said suspension system to vary the overlap between said sets of plates, and thus the capacitance of said capacitor, and

a sensor coupled to sense the rate of change of said capacitance as an indication of viscosity of liquid in which the capacitor is immersed.

19. The MEMS of claim 18, further comprising a drive actuator, coupled to move at least one of said sets of interdigitated plates parallel to the other interdigitated sets of plates to vary said overlap.

20. The MEMS of claim 19 wherein the drive actuator is a Lorentz actuator.

21. The MEMS of claim 19, wherein the drive actuator is an electrostatic actuator.

22. A micro-electromechanical system (MEMS) device being configured for movement within a fluid having a fluid viscosity so as to sense said fluid viscosity of the fluid, comprising:

an actuator for placing a driving force on said MEMS device to cause said MEMS device to move within said fluid; and

a sensor coupled to said MEMS device for sensing said relative movement of said MEMS device.

23. A method for measuring viscosity of a liquid having a viscosity value using a MEMS device having a variable capacitor, the variable capacitor comprising a plurality of plates, the plates being configured to interleave, a drive actuator and a sensor, wherein the rate of change in the capacitance between the capacitor plates allow the sensing of the viscosity value of the liquid, comprising the steps of:

submerging at least a portion of the MEMS device into the liquid;

applying, from the drive actuator, a driving force to said variable capacitor, the application of the driving force causing relative movement between said plates such that at least a portion of the plates overlap, the overlap of said plates causing a rate of change of capacitance, said movement creating a shear force between each moving plate and said liquid, said shear force damping the movement of said plate;

sensing said rate of change of capacitance; and

determining said viscosity value, wherein said viscosity value corresponds to said capacitance change.

24. A method as claimed in claim 23 said liquid being replaceable, further comprising:

comparing the viscosity value to a reference viscosity value; and

determining whether said liquid should be replaced.

25. A method as claimed in claim 23, wherein said plates have a response time for responding to said driving force, further comprising sensing said response time of said plates as an indicator of the viscosity value.

26. A micro-electromechanical system (MEMS) capable of being submerged in a liquid, comprising:

a substrate;

a thin plate having a surface area, disposed parallel to said substrate and spaced apart therefrom;

the plate being configured to move with respect to the substrate;

said surface of said plate providing predominantly shear interaction with said liquid; and

a motion actuator carried by said substrate coupled to move said plate.

27. The MEMS of claim 26, further comprising a sensor which senses the rate of movement of the plate with respect to the substrate.

28. The MEMS of claim 27, wherein the sensor is a comb capacitor.