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Acceleration/angular velocity sensor unit

  • US 20060065050A1
  • Filed: 09/30/2005
  • Published: 03/30/2006
  • Est. Priority Date: 09/30/2004
  • Status: Active Grant
First Claim
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1. An acceleration/angular velocity sensor unit comprising:

  • an X-direction acceleration sensor for sensing an acceleration in an X-axis direction, a Y-direction acceleration sensor for sensing an acceleration in a Y-axis direction, a Z-direction acceleration sensor for sensing an acceleration in a Z-axis direction, an X-axis angular velocity sensor for sensing an angular velocity around an X-axis, a Y-axis angular velocity sensor for sensing an angular velocity around a Y-axis, and a Z-axis angular velocity sensor for sensing an angular velocity around a Z-axis are packaged on a same substrate, where the X-axis, the Y-axis, and the Z-axis intersect orthogonally mutually, wherein the X-direction acceleration sensor, the X-axis angular velocity sensor, the Y-direction acceleration sensor, and the Y-axis angular velocity sensor are packaged on one side of a back surface or a surface of the substrate such that respective X-axes and respective Y-axes are set in parallel respectively, and the Z-direction acceleration sensor and the Z-axis angular velocity sensor are packaged on other side of the back surface or the surface of the substrate such that respective Z-axes are set perpendicularly to the other side.

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