Capacitance type physical quantity sensor having sensor chip and circuit chip
First Claim
1. A capacitance type physical quantity sensor comprising:
- a sensor chip for detecting a physical quantity; and
a circuit chip for processing a signal outputted from the sensor chip, wherein the sensor chip includes;
a support substrate;
a semiconductor layer disposed on one side of the substrate;
a movable electrode disposed in the semiconductor layer and displaceable in a direction parallel to the substrate in accordance with the physical quantity; and
a fixed electrode disposed in the semiconductor layer and facing the movable electrode, the sensor chip is capable of detecting the physical quantity on the basis of a capacitance change of a capacitor provided between the movable electrode and the fixed electrode, the capacitance change is provided by a displacement of the movable electrode in accordance with the physical quantity, the sensor chip is stacked on the circuit chip in such a manner that the movable electrode and the fixed electrode face the circuit chip, the sensor chip is electrically connected to the circuit chip, the movable electrode has a thickness in a stacking direction of the sensor chip, the sensor chip has a first distance between the movable electrode and the circuit chip and a second distance between the movable electrode and the support substrate, and the thickness of the movable electrode is larger than the first distance and the second distance.
1 Assignment
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Accused Products
Abstract
A capacitance type physical quantity sensor includes a sensor chip and a circuit chip. The sensor chip includes: a support substrate; a semiconductor layer; a movable electrode; and a fixed electrode. The sensor chip is stacked on the circuit chip such that the movable electrode and the fixed electrode face the circuit chip. The movable electrode has a thickness in a stacking direction. The sensor chip has a first distance between the movable electrode and the circuit chip and a second distance between the movable electrode and the support substrate. The thickness of the movable electrode is larger than the first distance and the second distance.
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Citations
8 Claims
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1. A capacitance type physical quantity sensor comprising:
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a sensor chip for detecting a physical quantity; and
a circuit chip for processing a signal outputted from the sensor chip, wherein the sensor chip includes;
a support substrate;
a semiconductor layer disposed on one side of the substrate;
a movable electrode disposed in the semiconductor layer and displaceable in a direction parallel to the substrate in accordance with the physical quantity; and
a fixed electrode disposed in the semiconductor layer and facing the movable electrode, the sensor chip is capable of detecting the physical quantity on the basis of a capacitance change of a capacitor provided between the movable electrode and the fixed electrode, the capacitance change is provided by a displacement of the movable electrode in accordance with the physical quantity, the sensor chip is stacked on the circuit chip in such a manner that the movable electrode and the fixed electrode face the circuit chip, the sensor chip is electrically connected to the circuit chip, the movable electrode has a thickness in a stacking direction of the sensor chip, the sensor chip has a first distance between the movable electrode and the circuit chip and a second distance between the movable electrode and the support substrate, and the thickness of the movable electrode is larger than the first distance and the second distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification