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Multi element tool designs for modifying surface characteristics of substrates

  • US 20060065085A1
  • Filed: 09/01/2005
  • Published: 03/30/2006
  • Est. Priority Date: 09/29/2004
  • Status: Abandoned Application
First Claim
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1. An assembly for modifying a surface of a workpiece, said assembly being responsive to a plurality of control signals, said assembly comprising:

  • a plurality of tools configured to modify the surface of the workpiece;

    at least one first displacement mechanism arranged to displace the plurality of tools relative to the workpiece in a coordinate system in response to at least one of the control signals;

    a plurality of second displacement mechanisms supported by the first displacement mechanism, said second displacement mechanisms being configured to provide independent displacement of each of the plurality of tools relative to the workpiece in response to at least one of the control signals.

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