Double-electret mems actuator
First Claim
1. An actuator, comprising:
- a first electret layer having an electrical charge;
a first conductive layer residing on said first electret layer;
a moveable second electret layer, wherein said second electret layer is in a spaced apart relation to said first conductive layer in a quiescent state;
a second conductive layer in a spaced apart relation to said second electret layer in said quiescent state; and
a voltage source configured to selectively apply a voltage between said first and said second conductive layer.
6 Assignments
0 Petitions
Accused Products
Abstract
An actuator (100) taking advantage of ponderomotive forces to enhance its electromechanical performance as a function of input energy. An actuator (100) may include a first conductive layer (102) residing on a first electret layer (101). The actuator (100) may further include a moveable second electret layer (103) which is spaced apart in relation to the first conductive layer (102) when the second electret layer (103) is in a quiescent state. The actuator (100) may further include a second conductive layer (104) in a spaced apart relation to the second electret layer (103) when the second electret layer (103) is in the quiescent state. The actuator (100) may further include a voltage source (105) configured to selectively apply a voltage between the first (102) and second (104) conductive layers thereby propelling the second electret layer (103) to either the first (102) or second (104) conductive layer.
43 Citations
23 Claims
-
1. An actuator, comprising:
-
a first electret layer having an electrical charge;
a first conductive layer residing on said first electret layer;
a moveable second electret layer, wherein said second electret layer is in a spaced apart relation to said first conductive layer in a quiescent state;
a second conductive layer in a spaced apart relation to said second electret layer in said quiescent state; and
a voltage source configured to selectively apply a voltage between said first and said second conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. An actuator, comprising:
-
a first conductive layer;
a moveable electret layer, wherein said electret layer is in a spaced apart relation to said first conductive layer in a quiescent state;
a second conductive layer in a spaced apart relation to said electret layer in said quiescent state; and
a voltage source configured to selectively apply a voltage between said first and said second conductive layer. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
-
Specification