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Double-electret mems actuator

  • US 20060066934A1
  • Filed: 03/11/2003
  • Published: 03/30/2006
  • Est. Priority Date: 03/11/2002
  • Status: Active Grant
First Claim
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1. An actuator, comprising:

  • a first electret layer having an electrical charge;

    a first conductive layer residing on said first electret layer;

    a moveable second electret layer, wherein said second electret layer is in a spaced apart relation to said first conductive layer in a quiescent state;

    a second conductive layer in a spaced apart relation to said second electret layer in said quiescent state; and

    a voltage source configured to selectively apply a voltage between said first and said second conductive layer.

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