Method and device for multistate interferometric light modulation
First Claim
1. A light modulator, comprising:
- a movable reflector comprising an electrically conductive material, the movable reflector positioned between first and second electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than is the undriven position and wherein the second driven position is farther from the first electrode than is the undriven position;
at least one third electrode adjacent to the first electrode; and
at least one fourth electrode adjacent to the second elelctrode.
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Accused Products
Abstract
A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.
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Citations
25 Claims
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1. A light modulator, comprising:
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a movable reflector comprising an electrically conductive material, the movable reflector positioned between first and second electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than is the undriven position and wherein the second driven position is farther from the first electrode than is the undriven position;
at least one third electrode adjacent to the first electrode; and
at least one fourth electrode adjacent to the second elelctrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A light modulator, comprising:
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means for reflecting light positioned between first and second means for positioning the reflecting means, the reflecting means being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first positioning means than is the undriven position and wherein the second driven position is farther from the first positioning means than is the undriven position;
third means for positioning the reflecting means adjacent to the first positioning means; and
fourth means for positioning the reflecting means adjacent to the second positioning means. - View Dependent Claims (19, 20)
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21. A method of driving a MEMS device comprising first, second, third, and fourth electrodes, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising:
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applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a position substantially in contact with a dielectric layer, wherein a force is created attracting the movable electrode towards the dielectric layer;
applying a second voltage potential difference between the first electrode and the movable electrode and a third voltage potential difference between the second electrode and the movable electrode so as to overcome the force attracting the movable electrode towards the dielectric layer and to drive the movable electrode away from the dielectric layer;
applying a fourth voltage potential difference between the third electrode and the movable electrode; and
applying a fifth voltage potential difference between the fourth electrode and the movable electrode, wherein the force attracting the movable electrode towards the dielectric layer is based at least in part on the fourth and fifth voltages. - View Dependent Claims (22)
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23. A method of fabricating a multistate light modulator, the method comprising:
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forming first and second electrodes;
forming a movable reflector comprising an electrically conductive material, the movable reflector positioned between the first and second electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first electrode than is the undriven position and wherein the second driven position is farther from the first electrode than is the undriven position;
forming at least one third electrode adjacent to the first electrode; and
forming at least one fourth electrode adjacent to the second elelctrode. - View Dependent Claims (24, 25)
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Specification