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MEMS mirror with tip or piston motion for use in adaptive optics

  • US 20060066964A1
  • Filed: 09/29/2004
  • Published: 03/30/2006
  • Est. Priority Date: 09/29/2004
  • Status: Active Grant
First Claim
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1. A micro-electromechanical systems (MEMS) device, comprising:

  • a plurality of spaced deformable spring bars, each of said deformable spring bars being coupled together at least at a first surface thereof; and

    a first moveable drive plate coupled to said deformable spring bars on a surface of said deformable spring bars opposite to first surface, said first moveable drive plate being adapted to cause said deformable spring bars to torque in a local vicinity of their coupling location to said drive plate.

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