MEMS mirror with tip or piston motion for use in adaptive optics
First Claim
1. A micro-electromechanical systems (MEMS) device, comprising:
- a plurality of spaced deformable spring bars, each of said deformable spring bars being coupled together at least at a first surface thereof; and
a first moveable drive plate coupled to said deformable spring bars on a surface of said deformable spring bars opposite to first surface, said first moveable drive plate being adapted to cause said deformable spring bars to torque in a local vicinity of their coupling location to said drive plate.
4 Assignments
0 Petitions
Accused Products
Abstract
An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled together, e.g., by a cross bar. A support is coupled at one end to the cross bar and at its opposite end to the mirror. Coupled across the deformable spring bars on the opposite side thereof from the mirror support, is at least one moveable drive plate. Motion by the moveable drive plate causes the deformable spring bars to torque, e.g., in the local vicinity of the connection of the drive plate to the deformable spring bars. The torque causes the deformable spring bars to move downward, e.g., near their centers. As a result, cross bar, and hence the mirror, move downward.
-
Citations
40 Claims
-
1. A micro-electromechanical systems (MEMS) device, comprising:
-
a plurality of spaced deformable spring bars, each of said deformable spring bars being coupled together at least at a first surface thereof; and
a first moveable drive plate coupled to said deformable spring bars on a surface of said deformable spring bars opposite to first surface, said first moveable drive plate being adapted to cause said deformable spring bars to torque in a local vicinity of their coupling location to said drive plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
-
27. A micro-electromechanical systems (MEMS) device, comprising:
-
at least one deformable spring bar coupled at a first surface thereof to a plate; and
a first moveable drive plate coupled to said at least one deformable spring bar on a surface thereof opposite to said first surface, said first moveable drive plate being adapted to cause said at least one deformable spring bar to torque in a local vicinity of its coupling location to said drive plate. - View Dependent Claims (28, 29, 30)
-
-
31. A micro-electromechanical systems (MEMS) device, comprising:
-
deformable support means, said deformable support means including at least one deformable spring bar; and
drive means coupled to one surface of said deformable support means to cause said deformable support means to torque in a local vicinity of their coupling location to said drive means. - View Dependent Claims (32, 33, 34, 35, 37, 38, 39, 40)
-
-
36. (canceled)
Specification