ROTATING SHUTTER FOR LASER-PRODUCED PLASMA DEBRIS MITIGATION
First Claim
1. A shutter assembly for mitigating debris in a laser-produced plasma device, the shutter assembly comprising:
- a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and wherein the shutter obstructs the line-of-sight between the radiation source and the exit during a second period of rotation; and
a motor configured to rotate the shutter to permit passage of radiation through the at least one aperture during the first period of rotation, and to obstruct the passage of debris generated at the radiation source through the at least one aperture during the second period of rotation.
4 Assignments
0 Petitions
Accused Products
Abstract
A laser produced plasma device comprises a shutter assembly for mitigating the contaminating effects of debris generated by the plasma. In one embodiment, the shutter assembly includes a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and obstructs the line-of-sight between the radiation source and the exit during a second period of rotation. The shutter assembly in this embodiment also includes a motor configured to rotate the shutter to permit passage of the X-rays through the at least one aperture during the first period of rotation, and to thereafter rotate the shutter to obstruct passage of the debris through the at least one aperture during the second period of rotation.
-
Citations
20 Claims
-
1. A shutter assembly for mitigating debris in a laser-produced plasma device, the shutter assembly comprising:
-
a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and wherein the shutter obstructs the line-of-sight between the radiation source and the exit during a second period of rotation; and
a motor configured to rotate the shutter to permit passage of radiation through the at least one aperture during the first period of rotation, and to obstruct the passage of debris generated at the radiation source through the at least one aperture during the second period of rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method for mitigating debris in a laser-produced plasma device, the method comprising:
-
providing a rotatable shutter having at least one aperture;
rotating the shutter to provide a line-of-sight between a radiation source and an exit of the device through the at least one aperture during a first period of rotation;
rotating the shutter to obstruct the line-of-sight between the radiation source and the exit during the second period of rotation; and
whereby rotating the shutter during the first period of rotation permits the passage of radiation generated at the radiation source through the at least one aperture to the exit, and obstructs the passage of debris generated at the radiation source through the at least one aperture during the second period of rotation. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
-
-
17. A laser-produced plasma device, comprising:
-
a laser source for laser irradiation of a target;
a radiation source comprising a target that forms a plasma that generates short-wavelength radiation and generates debris when irradiated by the laser; and
a shutter assembly for obstructing the passage of debris through an exit, the shutter assembly comprising;
a rotatable shutter having at least one aperture that provides a line-of-sight between the radiation source and the exit of the device during a first period of rotation of the shutter, and obstructs a line-of-sight between the radiation source and the exit during a second period of rotation, and a motor configured to rotate the shutter to permit passage of the radiation through the at least one aperture during the first period of rotation, and to obstruct the passage of the debris through the at least one aperture during the second period of rotation. - View Dependent Claims (18, 19, 20)
-
Specification