Photonic crystal optical temperature measuring system

• US 20060067605A1
• Filed: 09/30/2004
• Published: 03/30/2006
• Est. Priority Date: 09/30/2004
• Status: Abandoned Application

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Mirkarimi, Laura Wills, Sigalas, Mihail M., Grot, Annette C.
• Application Number:
  US10/954,748
• Publication Number:
  US 20060067605A1
• Time in Patent Office: Days
• US Class Current: 385/12
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 5/44 using change of resonant frequency, e.g. of piezoelectric crystals
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices

Abstract

A photonic crystal optical temperature measuring system and a method for measuring the temperature of an object. The photonic crystal optical temperature measuring system has at least one photonic crystal temperature sensor having a resonant cavity, the resonant frequency of which is a function of the temperature of the resonant cavity.

Claims

1. A photonic crystal optical temperature measuring system, comprising:

at least one photonic crystal temperature sensor apparatus, the at least one photonic crystal temperature sensor apparatus comprising a photonic crystal slab waveguide having a resonant cavity, a resonant frequency of the resonant cavity being a function of a temperature of the resonant cavity;

a wavelength source for illuminating the resonant cavity;

a detector for detecting the resonant frequency of the resonant cavity; and

a converter for converting the detected resonant frequency to temperature.

2. The system according to claim 1, wherein the wavelength source comprises a light source selected from the group consisting of a tunable laser and a broad band light source.

3. The system according to claim 1, wherein the photonic crystal slab waveguide has an index of refraction at least as high as about three.

4. The system according to claim 3, wherein the photonic crystal slab waveguide has an index of refraction of from about 3 to about 4.

5. The system according to claim 1, wherein the photonic crystal slab waveguide comprises a material selected from the group consisting of Si, Ge, GeAs, InP, CdS and CdSe.

6. The system according to claim 1, wherein the photonic crystal slab waveguide comprises a lattice of holes, and wherein the resonant cavity comprises a hole having a radius less than the radius of the holes of the lattice of holes.

7. The system according to claim 1, wherein the at least one photonic crystal temperature sensor apparatus further comprises:

an upper cladding layer on an upper surface of the photonic crystal slab waveguide; and

a lower cladding layer on a lower surface of the photonic crystal slab waveguide,

wherein the index of refraction of the photonic crystal slab waveguide is greater than the indices of refraction of the upper cladding layer and the lower cladding layer.

8. The system according to claim 1, wherein the at least one photonic crystal temperature sensor apparatus comprises a plurality of photonic crystal temperature sensor apparatus arranged in an array.

9. The system according to claim 1, wherein the detector detects light output from the at least one photonic crystal temperature sensor apparatus through the photonic crystal slab waveguide of the at least one photonic crystal temperature sensor apparatus.

10. The system according to claim 1, wherein the detector detects light output from the at least one photonic crystal temperature sensor apparatus outside a plane of the photonic crystal slab waveguide of the at least one photonic crystal temperature sensor apparatus.

11. A photonic crystal temperature sensor apparatus, comprising:

a photonic crystal slab waveguide having a resonant cavity, a resonant frequency of the resonant cavity being a function of a temperature of the resonant cavity;

an upper cladding layer on an upper surface of the photonic crystal slab; and

a lower cladding layer on a lower surface of the photonic crystal slab.

12. The apparatus according to claim 11, wherein the photonic crystal slab waveguide has an index of refraction at least as high as about three.

13. The apparatus according to claim 12, wherein the photonic crystal slab waveguide has an index of refraction of from about 3 to about 4.

14. The apparatus according to claim 11, wherein the photonic crystal slab waveguide comprises a material selected from the group consisting of Si, Ge, GeAs, InP, CdS and CdSe.

15. The apparatus according to claim 12, wherein the index of refraction of the photonic crystal slab waveguide is greater than the indices of refraction of the upper cladding layer and the lower cladding layer.

16. The apparatus according to claim 11, wherein the photonic crystal slab waveguide comprises a lattice of holes, and wherein the resonant cavity comprises a hole having a radius less than the radius of the holes of the lattice of holes.

17. A method for measuring a temperature of an object, comprising:

providing at least one photonic crystal temperature sensor apparatus, the at least one photonic crystal temperature sensor apparatus having a resonant cavity, a resonant frequency of the resonant cavity being a function of a temperature of the resonant cavity;

positioning the at least one photonic crystal temperature sensor apparatus in the vicinity of the object;

directing light through the resonant cavity;

measuring the resonant frequency of the resonant cavity; and

converting the measured resonant frequency to a temperature.

18. The method according to claim 17, wherein positioning the at least one photonic crystal temperature sensor apparatus in the vicinity of the object comprises positioning the at least one photonic crystal sensor apparatus on the object.

19. The method according to claim 17, wherein the object comprises a semiconductor integrated circuit.

20. The method according to claim 17, wherein the at least one photonic crystal temperature sensor apparatus comprises a plurality of photonic crystal temperature sensor apparatus.

21. The method according to claim 17, wherein directing light through the resonant cavity comprises directing light through the resonant cavity from one of a tunable laser and a broad band light source.

22. The method according to claim 17, wherein measuring the resonant frequency of the resonant cavity comprises detecting light output from the at least one photonic crystal temperature sensor apparatus.