MEMS device fabricated on a pre-patterned substrate
First Claim
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1. A method of making a microelectromechanical systems device, comprising:
- providing a substrate having a plurality of trenches;
depositing at least one layer over the substrate, wherein the layer is discontinuous at the trenches; and
creating a first cavity between a first electrode formed over the substrate and a second electrode, wherein the at least one layer comprises the first electrode.
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate reflected light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
120 Citations
42 Claims
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1. A method of making a microelectromechanical systems device, comprising:
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providing a substrate having a plurality of trenches;
depositing at least one layer over the substrate, wherein the layer is discontinuous at the trenches; and
creating a first cavity between a first electrode formed over the substrate and a second electrode, wherein the at least one layer comprises the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A display device, comprising:
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a substrate embossed having a plurality of grooves formed therein;
a first electrode formed over a top surface of the substrate and a second electrode, wherein the first electrode and the second electrode are insulated from each other and separated by a first cavity;
a semi-reflective layer separated from the second electrode by a second cavity; and
a transparent material formed over the semi-reflective layer. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method of forming a microelectromechanical systems device, comprising:
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providing a substrate having a top surface, wherein a plurality of grooves is formed in the top surface;
depositing at least one layer over the substrate, wherein the at least one layer comprises a first conductive material and is discontinuous at the grooves forming rows of the layer between the grooves on the top surface; and
depositing a second conductive material, wherein the second conductive material is oriented orthogonally to the first conductive material on the top surface. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37)
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38. A display device, comprising
a substrate having a plurality of grooves formed therein; -
a first reflecting means for reflecting light formed over a top surface of the substrate and a second reflecting means for reflecting light, wherein the first reflecting means and the second reflecting means are insulated from each other and separated by a first cavity;
a semi-reflective layer separated from the second reflecting means by a second cavity; and
a viewing means for transmitting light, the viewing means formed over the semi-reflective layer. - View Dependent Claims (39, 40, 41, 42)
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Specification