Methods of forming a thin layer for a semiconductor device and apparatus for performing the same
First Claim
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1. A method of forming a thin layer for a semiconductor device, comprising:
- forming a recessed portion on an object; and
forming an insulation layer on the object by reacting a water vapor, an oxygen gas comprising an oxygen radical and an organic silicon source gas with each other, so that the recessed portion is filled with the insulation layer.
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Abstract
The present invention can provide methods of forming a thin layer for a semiconductor device. The methods can include forming a recessed portion on an object, and forming an insulation layer on the object by reacting a water vapor, an oxygen gas including an oxygen radical and an organic silicon source gas with each other, so that the recessed portion is filled with the insulation layer. Accordingly, a flow characteristic of the insulation layer can be improved, so that a seam defect can be sufficiently decreased in the insulation layer. The present invention can further provide apparatus for forming a thin layer.
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Citations
28 Claims
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1. A method of forming a thin layer for a semiconductor device, comprising:
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forming a recessed portion on an object; and
forming an insulation layer on the object by reacting a water vapor, an oxygen gas comprising an oxygen radical and an organic silicon source gas with each other, so that the recessed portion is filled with the insulation layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 18)
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10. A method of forming a thin layer for a semiconductor device, comprising:
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forming a recessed portion on an object;
forming a first insulation layer on the object and inner surfaces of the recessed portion by reacting an organic silicon source gas with an ozone gas, so that a size of the recessed portion is reduced, thereby forming a reduced recess; and
forming a second insulation layer on the first insulation layer by reacting a water vapor, an oxygen gas comprising an oxygen radical and an organic silicon source gas with each other, so that the reduced recess is filled with the second insulation layer. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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19. An apparatus for forming a thin layer for a semiconductor device, comprising:
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a processing chamber into which an object comprising a recessed portion is loaded, an insulation layer being formed on the object and the recessed portion being filled with the insulation layer in the processing chamber;
a first gas supplier for supplying a water vapor into the processing chamber;
a second gas supplier for supplying an oxygen gas comprising an oxygen radical into the processing chamber; and
a third gas supplier for supplying an organic silicon source gas into the processing chamber. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification