Machining apparatus using a rotary machine tool to machine a workpiece

• US 20060068683A1
• Filed: 06/15/2005
• Published: 03/30/2006
• Est. Priority Date: 09/29/2004
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Sudo, Masaaki
• Granted Patent: US 7,101,256 B2
• Time in Patent Office: Days
• US Class Current: 451/5
• CPC Class Codes: B24B 49/12 involving optical means
• CPC Class Codes: B24B 55/02 Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant cooling or lubricating during dressing operation B24B53/095; incorporated in grinding wheels B24D
• CPC Class Codes: B24B 7/228 for grinding thin, brittle parts, e.g. semiconductors, wafers grinding edges of thin, brittle parts B24B9/065

Abstract

A machining apparatus includes a rotary machine tool for machining a workpiece. A nozzle jets a coolant for the rotary machine tool. Information which changes based on a position of the nozzle is obtained. The nozzle is moved based on the information obtained.

Claims

1. A machining apparatus, comprising:

a rotary machine tool to machine a workpiece;

a nozzle to supply a liquid coolant for the rotary machine tool;

means for obtaining information which changes based on a position of the nozzle; and

means for moving the nozzle based on the obtained information.

2. A machining apparatus according to claim 1, wherein the rotary machine tool includes a rotary grinder.

3. A machining apparatus according to claim 2, wherein the moving means includes an actuator to actuate the nozzle based on the information obtained.

4. A machining apparatus according to claim 3, further comprising:

a memory device to store information which changes based on a position of the nozzle,

wherein the moving means is further responsive to the information stored in the memory device to move the nozzle.

5. A machining apparatus according to claim 4, wherein the moving means further includes a controller to control the actuator based on the obtained information and the information stored in the memory device.

6. A machining apparatus according to claim 1, further comprising:

a light source to emit a light beam toward the coolant,

wherein the obtaining means includes a photo detctor to detect an intensity distribution of the light beam which reflects off the coolant.

7. A machining apparatus according to claim 1, wherein the obtaining means includes a pressure sensor to detect a pressure of the coolant which is scattered by the rotary machine tool.

8. A machining apparatus according to claim 1, wherein the obtaining means includes a camera to obtain an image of the nozzle.

9. A machining apparatus according to claim 1, further comprising:

a motor to rotate the rotary machine tool,

wherein the obtaining means includes a sensor to detect a load on the motor.

11. A machining apparatus according to claim 1, further comprising:

a light source to emit a light beam toward the coolant,

wherein the sensor includes a photo detctor to detect an intensity distribution of the light beam which reflects off the coolant.

10. A machining apparatus, comprising:

a rotary machine tool to machine a workpiece;

a nozzle to supply a liquid coolant for the rotary machine tool;

a sensor to obtain information which changes based on a position of the nozzle; and

an actuator to move the nozzle based on the information obtained by the sensor.

12. A machining apparatus according to claim 10, wherein the sensor includes a pressure sensor to detect a pressure of the coolant which is scattered by the rotary machine tool.

13. A machining apparatus according to claim 10, wherein the sensor includes a camera to obtain an image of the nozzle.

14. A machining apparatus according to claim 10, further comprising:

a motor to rotate the rotary machine tool,

wherein the sensor includes a sensor to detect a load on the motor.

15. A machining apparatus according to claim 10, further comprising:

a controller coupled to receive a sensor signal, output by the sensor, representative of the obtained information, the controller adapted to output a control signal to control the actuator to move the nozzle based on the sensor signal.

16. A method of machining, comprising:

machining a workpiece using a rotary machine tool;

supplying a liquid coolant with a nozzle for the rotary machine tool;

obtaining information which changes based on a position of the nozzle; and

moving the nozzle based on the information obtained.

17. A method of machining according to claim 16, further comprising

emitting a light beam toward the coolant,

wherein obtaining information includes obtaining an intensity distribution of the light beam which reflects off the coolant.

18. A method of machining according to claim 16, wherein obtaining information includes detecting a pressure of the coolant which is scattered by the rotary machine tool.

19. A method of machining according to claim 16, wherein obtaining information includes obtaining an image of the nozzle.

20. A method of machining according to claim 16, further comprising:

rotating the rotary machine tool with a motor,

wherein obtaining information includes detecting a load on the motor.