Network-based photomask data entry interface and instruction generator for manufacturing photomasks

• US 20060074510A1
• Filed: 11/18/2005
• Published: 04/06/2006
• Est. Priority Date: 07/05/2000
• Status: Active Grant

• Current Assignee: Toppan Photomasks Incorporated (TOPPAN Holdings, Inc.)
• Original Assignee: Toppan Photomasks Incorporated (TOPPAN Holdings, Inc.)
• Inventors: Cogdell, Thomas T., Gentry, Jan E., Schepp, Jeffry S.
• Granted Patent: US 7,398,509 B2
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: G03F 1/00 Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
• CPC Class Codes: G03F 1/68 Preparation processes not covered by groups G03F1/20 - G03F1/50
• CPC Class Codes: G06Q 30/02 Marketing; Price estimation or determination; Fundraising
• CPC Class Codes: G06Q 30/04 Billing or invoicing
• CPC Class Codes: G06Q 30/0603 Catalogue ordering
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: H01J 2237/31762 Computer and memory organisation
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer'"'"'s computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer'"'"'s local network. The manufacturer'"'"'s computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.

Claims

1. A computer network for generating instructions for use by photomask manufacturing equipment, comprising:

an interface computer accessible to a remote customer computer via a remote network connection, and during the network connection, the interface computer operable to perform the following tasks;

receive photomask specification data from the customer computer, validate the photomask specification data, and download validation results to the customer computer;

wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;

a photomask specification database in communication with the interface computer, operable to store the photomask specification data;

a command generator in communication with the photomask specification database, operable to generate fracturing instructions and control instructions in response to the photomask specification data;

a customer design database that stores design data for the photomask; and

a fracture engine that receives the fracturing instructions and the design data and uses this data to generate fractured pattern data.

2. The network of claim 1, wherein the customer design database has a communications interface for receiving design data from the customer in electronic form.

3. The network of claim 1, further comprising a billing data generator that selects billing data from the photomask specification data and arranges the billing data in a format suitable for a billing system.

4. The network of claim 1, wherein the command generator is further operable to deliver the control instructions to memory accessible by the manufacturing equipment.

5. The network of claim 1, wherein the fracture engine is further operable to deliver the fractured pattern data to memory accessible by the manufacturing equipment.

6. The network of claim 1, wherein the interface computer validates the photomask specification data by determining whether data has been entered in a specified format.

7. The network of claim 1, wherein the interface computer validates the photomask specification data by determining whether data complies with dimensional criteria.

8. The network of claim 1, wherein the interface computer validates the photomask specification data by validating fracturing data.

9. A network-based method of generating instructions for use by photomask manufacturing equipment, comprising the steps of:

downloading a series of display screens to a customer computer via a remote network connection, each of the network screens operable to prompt the customer to enter photomask specification data;

wherein the photomask specification data at least identifies layers, patterns, placements, and fracturing data for at least one photomask;

receiving the photomask specification data from the customer computer via the remote network connection, at local computing equipment on a local network of the photomask manufacturer; and

using the local computing equipment to perform the following tasks;

to validate the photomask specification data during the remote network connection;

to generate fracturing instructions in response to the photomask specification data;

to receive pattern design data from the customer;

to use the fracturing instructions and the pattern design data to generate fractured pattern data; and

to generate control instructions for the manufacturing equipment.

10. The method of claim 9, wherein the local computing equipment receives the pattern design data from the customer in electronic form.

11. The method of claim 9, wherein the downloading step is further performed by downloading a screen operable to prompt the use to enter billing data, and further comprising the steps of arranging the billing data in a format suitable for a billing system, and delivering the billing data to the billing system.

12. The method of claim 9, wherein the screens comprise at least a layer data screen and a pattern data screen and wherein the pattern data screen lists layers based on data provided to the layer data screen.

13. The method of claim 9, wherein the screens comprise at least a layer data screen and a pattern placement screen and wherein the pattern placement screen lists layers based on data provided to the layer data screen.

14. The method of claim 9, wherein the screens comprise at least a pattern data screen and a fracture screen, and wherein the fracture screen lists patterns based on data provided to the pattern data screen.

15. The method of claim 9, wherein the local computing equipment further delivers the fractured pattern data and the control instructions to the manufacturing equipment.

16. The method of claim 9, wherein the local computing equipment comprises an interface computer, a command generator, and a fracture engine, implemented on at least one computer.

17. The method of claim 9, wherein the local computing equipment further generates a billing file for use by the manufacturer'"'"'s billing system.

18. The method of claim 9, wherein the local computing equipment validates the photomask specification data by determining whether data has been entered in a specified format.

19. The method of claim 9, wherein the local computing equipment validates the photomask specification data by determining whether data complies with dimensional criteria.

20. The method of claim 9, wherein the local computing equipment validates the photomask specification data by validating fracturing data.