Active matrix type display device and method of manufacturing the same
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Abstract
A method of manufacturing an active matrix type display device, which is reliable and flexible, is provided. An active matrix type display device according to an aspect of the present invention includes: a first substrate, which is flexible; a thin glass layer provided on the first substrate via an adhesion layer, and having projections and depressions on a surface thereof opposing to the first substrate, the projections and depressions having rounded tips and bottoms; active elements provided on the thin glass layer, each active element corresponding to a pixel; a display provided above the thin glass layer, and driven by the active elements to display an image pixel by pixel; and a second substrate provided on the display, and having an opposing electrode formed thereon.
52 Citations
18 Claims
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1-16. -16. (canceled)
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17. A method of manufacturing an active matrix type display device, the method comprising:
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forming active elements each corresponding to a pixel on a device forming substrate of glass;
polishing the device forming substrate to make it thinner by first performing a mechanical polishing, and then performing a chemical polishing;
bonding a surface of the device forming substrate, which has been polished, to a plastic substrate via an adhesion layer; and
forming a display driven by the active elements to display an image pixel by pixel, by placing a counter substrate so as to oppose to the device forming substrate.
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18. A method of manufacturing an active matrix type display device, the method comprising:
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forming active elements each corresponding to a pixel on a device forming substrate of glass;
polishing the device forming substrate to make it thinner;
forming a compressive stress applying layer on a polished surface of the device forming substrate, a coefficient of linear expansion of the compressive stress applying layer being larger than a coefficient of linear expansion of the device forming substrate, and then cooling the compressive stress applying layer;
bonding a plastic substrate to a surface of the device forming layer via an adhesion layer, on which the compressive stress applying layer is formed; and
forming a display driven by the active elements to display an image pixel by pixel, by placing a counter substrate so as to oppose to the device forming substrate.
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Specification