Methods and apparatus for particle reduction in MEMS devices
First Claim
1. A method for assembling a micro-electromechanical system (MEMS) device, the device including a micro-machine, said method comprising:
- forming the micro-machine on a die, the die having a top surface and a bottom surface;
providing a plurality of die bonding pedestals on a surface of a housing; and
mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.
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Abstract
A method for assembling a micro-electromechanical system (MEMS) device that includes a micro-machine is described. The method comprises forming the micro-machine on a die, the die having a top surface and a bottom surface, providing a plurality of die bonding pedestals on a surface of a housing, and mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.
22 Citations
27 Claims
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1. A method for assembling a micro-electromechanical system (MEMS) device, the device including a micro-machine, said method comprising:
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forming the micro-machine on a die, the die having a top surface and a bottom surface;
providing a plurality of die bonding pedestals on a surface of a housing; and
mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material. - View Dependent Claims (2, 3, 4, 5)
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6-15. -15. (canceled)
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16. A method for mounting a micro-machine portion of a micro-electromechanical system (MEMS) within a housing portion of the MEMS which also contains a getter, said method comprising:
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forming the micro-machine on a die; and
orienting the micro-machine within the housing such that the die is between the getter and components of the micro-machine. - View Dependent Claims (17)
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18-23. -23. (canceled)
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24. A method for protecting components of a micro-machine within a housing from loose gettering material within the housing, the micro-machine formed on a die, said method comprising:
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positioning a bottom surface of the die to at least partially shield the micro-machine components from the gettering material; and
attaching at least one of a top surface of the die and components of the micro-machine to die bonding pedestals on a surface of the housing. - View Dependent Claims (25, 26, 27)
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Specification