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MEMS device having deformable membrane characterized by mechanical persistence

  • US 20060077156A1
  • Filed: 07/28/2005
  • Published: 04/13/2006
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A microelectromechanical (MEMS) device, comprising:

  • a substrate;

    a first layer, the first layer and the substrate configured to have a first cavity therebetween, the first cavity having a first pressure, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer;

    a second layer, the second layer and the first layer configured to have a second cavity therebetween, the second cavity having a second pressure; and

    a structure in fluid communication with at least one of the first and second cavities, the structure configured to manipulate at least one of the first and second pressures to alter a speed of motion of the first layer.

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