MEMS device having deformable membrane characterized by mechanical persistence
First Claim
1. A microelectromechanical (MEMS) device, comprising:
- a substrate;
a first layer, the first layer and the substrate configured to have a first cavity therebetween, the first cavity having a first pressure, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer;
a second layer, the second layer and the first layer configured to have a second cavity therebetween, the second cavity having a second pressure; and
a structure in fluid communication with at least one of the first and second cavities, the structure configured to manipulate at least one of the first and second pressures to alter a speed of motion of the first layer.
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Accused Products
Abstract
An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.
194 Citations
72 Claims
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1. A microelectromechanical (MEMS) device, comprising:
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a substrate;
a first layer, the first layer and the substrate configured to have a first cavity therebetween, the first cavity having a first pressure, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer;
a second layer, the second layer and the first layer configured to have a second cavity therebetween, the second cavity having a second pressure; and
a structure in fluid communication with at least one of the first and second cavities, the structure configured to manipulate at least one of the first and second pressures to alter a speed of motion of the first layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A microelectromechanical (MEMS) device, comprising:
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a substrate;
a first layer comprising at least one aperture, the first layer and the substrate configured to have a first cavity therebetween, the first layer movable with respect to the substrate in response to a voltage applied to at least the first layer; and
a second layer comprising at least one aperture, the second layer and the first layer configured to have a second cavity therebetween, wherein the first and second cavities are in fluid communication through the at least one aperture of the first layer. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:
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providing a substrate;
providing a first sacrificial layer;
forming a first layer comprising at least one aperture, wherein the first sacrificial layer is disposed between the substrate and the first layer;
providing a second sacrificial layer, wherein the first layer is disposed between the first sacrificial layer and the second sacrificial layer; and
forming a second layer comprising at least one aperture, wherein the second sacrificial layer is disposed between the second layer and the first layer. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
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55. A microelectromechanical (MEMS) device, comprising:
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means for supporting a MEMS device;
means for reflecting light, the supporting means and the reflecting means configured to have a first cavity therebetween, the first cavity having a first pressure;
means for enclosing a second cavity, wherein said second cavity is located between said enclosing means and said reflecting means, the second cavity having a second pressure; and
means for manipulating at least one of the first and second pressures. - View Dependent Claims (56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66)
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67. A microelectromechanical (MEMS) device, comprising:
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means for supporting a MEMS device;
means for conducting electricity, the conducting means comprising at least one aperture, the conducting means configured to be movable with respect to the supporting means in response to a voltage applied to at least the conducting means, the supporting means and the conducting means configured to have a first cavity therebetween; and
means for dampening movement of the conducting means, the dampening means comprising at least one aperture, the conducting means and the dampening means configured to have a second cavity therebetween. - View Dependent Claims (68, 69, 70, 71, 72)
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Specification