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Mirror and mirror layer for optical modulator and method

  • US 20060077518A1
  • Filed: 07/01/2005
  • Published: 04/13/2006
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems mirror comprising a mirror body, wherein a surface of the mirror body comprises a reflective surface, and the mirror body comprises at least one cavity.

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